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The following vendors have this item available.
equipplus
[view on eBay] 		Used 1
in stock		 $49.90
Description: Applied Materials 0010-27490 Hose Assy UPR CHILL To HT Shield,EPI300mm,AMAT&3734
ecomicron
[view on eBay] 		NEW 5
in stock		 $250.00
Description: 0200-00340, Applied Materials, BUSHING, UPR SHIELD INS, S-IMP REV 1.3,
farmoninc
[view on eBay] 		NEW 1
in stock		 $175.00
Description: AMAT 0002-13874 Ball Stud, UPR, Gas Spring, 419667
j316gallery
[view on eBay] 		Used 4
in stock		 $731.59
Description: 13397 LAM RESEARCH RING,PEZ,UPR,BEVEL,Y203,COATED 716-066539-006
spsglobal
[view on eBay] 		Used 1
in stock		 $50.00
Description: 344-0502// AMAT APPLIED 0090-36210 ELECTR ASSY. DTC UPR LID SW N. NEW
spsglobal
[view on eBay] 		Used 14
in stock		 $80.00
Description: 344-0502// AMAT APPLIED 0090-35120 ELECT ASSY, UPR LID SW, CENTUR NEW
j316gallery
[view on eBay] 		NEW 2
in stock		 $25.31
Description: 17497 APPLIED MATERIALS ELECTR ASSY. DTC UPR LID SW 0090-36210
techequipsales
[view on eBay] 		Used 1
in stock		 $500.00
Description: LAM Research 716-083964-011 QTZ LINER UPR ER Ring *new surplus, 90 day warranty*
techequipsales
[view on eBay] 		Used 1
in stock		 $375.00
Description: LAM Research 716-083964-011 QTZ LINER UPR ER Ring *cleaned once*
capitolareatech
[view on eBay] 		Used 1
in stock		 $318.95
Description: Lam Research (LAM) 713-031390-001 RING, UPR GAS DUAL FEED 200MM
grandbirdnet
[view on eBay] 		NEW 2
in stock		 $230.00
Description: AMAT 0200-00340 BUSHING, UPR SHIELD INS, S-IMP REV 1.3,, NEW
j316gallery
[view on eBay] 		NEW 3
in stock		 $725.26
Description: 22261 LAM RESEARCH RING, CLP, UPR ELCTD (NEW) 715-443098-001
getspares.com_sparesllc09
[view on eBay] 		Used 1
in stock		 $750.68
Description: 716-066539-005 / RING, PEZ, UPR, BEVEL, Y203, COATED, 299.5 / LAM RESEARCH CORP.
techequipsales
[view on eBay] 		Used 1
in stock		 $500.00
Description: Lam Research 716-250921-001 Insulator 200MM UPR ELECTD 384T *new
techequipsales
[view on eBay] 		Used 1
in stock		 $375.00
Description: LAM Research 715-011909-501 PL UPR ELCTD 8" CPTV POL *new surplus
getspares.com_sparesllc09
[view on eBay] 		Used 1
in stock		 $1,581.77
Description: 716-443090-010 / R, QTZ, UPR, HP / LAM RESEARCH
getspares.com_sparesllc09
[view on eBay] 		Used 1
in stock		 $750.68
Description: 716-066539-006 / RING, PEZ, UPR, BEVEL, Y203, 299.5 / LAM RESEARCH
getspares.com_sparesllc09
[view on eBay] 		Used 1
in stock		 $394.77
Description: 715-250586-001 / BAF BOT UPR ELCTD / LAM RESEARCH CORPORATION
expertsurplus
[view on eBay] 		Used 1
in stock		 $1,250.00
Description: LAM Research, 515-021101-001, Tool, Seal, PL, UPR RECTM Chamber, Used

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Historical Pricing Information

The following pricing information is available for this item.
VendorConditionSourceList PriceQuantity Sold ListedEnded
capitolareatech NEW - $500.00 0 Jan/04/13 Sep/01/13
Description: LAM 715-140124-001 BAF, 4528, UPR TPL SET
capitolareatech NEW - $243.44 0 May/09/14 Jun/12/14
Description: Lam Research (LAM) 853-330281-002 Assembly, RF Sen Box, UPR Match---not in ori
capitolareatech Refurbished - $187.50 0 Dec/27/14 Feb/24/16
Description: LAM RESEARCH (LAM) 713-031390-001 RING, UPR GAS DUAL FEED 200MM
prism_electronics6 Used - $2,999.95 0 Feb/06/15 Feb/25/15
Description: LAM 853-140389-001-A-262C ASSY, UPR MATCH, 4520XL OXD E/B, 853-140218-003
equipplus Used - $69.90 0 Feb/11/16 Jul/13/23
Description: LAM Research 715-250599-001 PL,Diffuser,UPR ELCTD,M503,SP8882-2172,unused&4048
capitolareatech NEW - $556.88 0 Feb/25/16 Jun/24/16
Description: LAM 715-330445-111 PL,ADPTR,UPR MTCH,TOP GAS
capitolareatech Refurbished - $187.50 0 Feb/29/16 Jun/28/16
Description: LAM RESEARCH 713-031390-001 RING, UPR GAS DUAL FEED 200MM
sparesllc09 NEW - $546.00 0 Jul/06/16 Aug/02/19
Description: 715-250717-001 / BAF,TOP,UPR ELCTD,150MM / LAM
capitolareatech NEW - $90.00 0 Jul/08/16 Sep/15/16
Description: AMAT 0090-35120 ELECT ASSY, UPR LID SW, CENTURA DPS
capitolareatech NEW - $556.88 0 Jul/09/16 Sep/15/16
Description: LAM 715-330445-111 PL,ADPTR,UPR MTCH,TOP GAS
capitolareatech Refurbished - $187.50 0 Jul/09/16 Sep/15/16
Description: LAM RESEARCH 713-031390-001 RING, UPR GAS DUAL FEED 200MM
capitolareatech Refurbished - $187.50 0 Sep/20/16 Nov/19/16
Description: LAM RESEARCH 713-031390-001 RING, UPR GAS DUAL FEED 200MM
prism_electronics11 Used - $499.99 0 Dec/06/16 Jan/20/22
Description: Lam Research 853-058147-001 ASSY Upper Process Head 146 UPR 839-057646-001 Rev.B
capitolareatech Refurbished - $187.50 0 Dec/20/16 Jun/20/20
Description: LAM RESEARCH 713-031390-001 RING, UPR GAS DUAL FEED 200MM
capitolareatech Used - $239.95 0 Aug/23/18 Jun/23/20
Description: LAM RESEARCH (LAM) 715-140124-001 BAF, 4528, UPR TPL SET
novusferro Used - $299.00 1 Nov/08/18 Dec/29/20
Description: Lam Research 716-066539-006 Ring, Pez, Upr, Bevel, Y2O3, Coated, 299.0
getspares.com_sparesllc09 Used - $300.00 0 Jul/09/19 Aug/23/23
Description: 857-033622-400 / KIT,UPR FR,SUPPORTS, E4, METRIC HW / LAM RESEARCH CORPORATION
svcstore Used - $89.99 0 Jul/17/19 Sep/16/19
Description: LAM Research 810-707188-001 Rev. A UPR RF Sense Box Board Assy
getspares.com_sparesllc09 NEW - $100.98 0 Aug/02/19 Nov/14/23
Description: 715-250717-001 / BAF,TOP,UPR ELCTD,150MM / LAM
capitolareatech Used - $90.00 0 Aug/29/19 Sep/18/19
Description: Applied Materials (AMAT) 0090-09164 ELEC ASSY,UPR LID SW,CENTURA DPS
capitolareatech Used - $90.00 0 Sep/05/19 Sep/26/19
Description: Applied Materials AMAT 0090-35120 ELECT ASSY UPR LID SW CENTURA DPS
svcstore Used - $80.99 0 Sep/16/19 Dec/27/22
Description: LAM Research 810-707188-001 Rev. A UPR RF Sense Box Board Assy
dom0808 Used - $151.80 0 Dec/04/19 Feb/11/22
Description: Lam Research Cable 853-240295-001 CA SIG RF HOIST BHD LWR BHD UPR 853-240295-001
capitolareatech Used - $90.00 0 Dec/06/19 Aug/13/20
Description: AMAT 0090-09164 ELEC ASSY,UPR LID SW,CENTURA DPS
capitolareatech NEW - $41.95 0 Jan/17/20 Aug/13/20
Description: Applied Materials (AMAT) 0090-36210 Electr Assy. DTC UPR Lid Centura
manufacturingequipment Used - $1,350.00 0 Mar/06/20 Sep/21/21
Description: Lam Research, 716-066539-004, RING PEZ UPR BEVEL Y2O3
manufacturingequipment Used - $759.38 0 Mar/25/20 Sep/21/21
Description: Lam Research 716-066539-008 RING, PEZ, UPR, BEVEL, Y2O3, COATED, 297.5mm
manufacturingequipment Used - $337.50 0 Apr/22/20 Sep/21/21
Description: Novellus 15-122178-00 RING, CARRIER, UPR SPINDLE / Lam Research
capitolareatech NEW - $503.95 0 Aug/18/20 Sep/30/24
Description: LAM RESEARCH (LAM) 715-140124-001 BAF, 4528, UPR TPL SET
capitolareatech Used - $407.95 0 Aug/18/20 Sep/30/24
Description: LAM RESEARCH (LAM) 715-140124-001 BAF, 4528, UPR TPL SET
j316gallery NEW - $143.15 0 Mar/10/21 Aug/07/23
Description: 23654 LAM RESEARCH ASSY, TILT SW, UPR MATCH (NEW) 853-370020-001
getspares.com_sparesllc09 Used - $500.03 1 Mar/11/22 Nov/13/23
Description: 15-122178-00 / RING, CARRIER, UPR SPINDLE / NOVELLUS
csi.usa Used - $940.00 2 Jul/10/23 May/09/24
Description: LAM Research, 515-021101-001, Tool, Seal, PL, UPR RCTM Chamber

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