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The following vendors have this item available.
usedeqsales
[view on eBay] 		Used 1
in stock		 $707.78
Description: Lam Research 853-020936-001 Upper Seal Plate Assembly 4420 Used Working
usedeqsales
[view on eBay] 		Used 1
in stock		 $711.11
Description: Lam Research 853-011117-001 Upper Chamber Parts Lot 010250C1-AO01E 4420 Used
usedeqsales
[view on eBay] 		Used 1
in stock		 $181.87
Description: Lam Research 853-025901-001-1-C136 EMO Assembly 4420 Etcher Used Working
grandbirdnet
[view on eBay] 		NEW 1
in stock		 $550.00
Description: LAM RESEARCH 716-018614-082 Focus Ring 200mm,Jeida,ESX,4420, NEW
usedeqsales
[view on eBay] 		Used 2
in stock		 $126.67
Description: Lam Research 713-013236-001 Outer Gate Exit Safety Cover Rainbow 4420 Used
usedeqsales
[view on eBay] 		Used 1
in stock		 $1,216.26
Description: Lam Research 713-011203-001 90 Degree Loadlock Cover Rev. E Rainbow 4420 Used
jetski0_7
[view on eBay] 		NEW 1
in stock		 $800.00
Description: Lam Research 853-190023-001 Controller Assembly 272072-00 Lam Rainbow 4420
jetski0_7
[view on eBay] 		NEW 1
in stock		 $1,000.00
Description: Lam Research 853-190023-001 Controller Assembly 272072-00 Lam Rainbow 4420
j316gallery
[view on eBay] 		Used 3
in stock		 $386.01
Description: 20037 LAM RESEARCH VERIFLO LAM 4420 VALVE ASSY 839-029227-100
capitolareatech
[view on eBay] 		Used 1
in stock		 $503.95
Description: LAM RESEARCH (LAM) 715-130080-008 4420 11200-3-E-00182139 Loadlock Chamber
usedeqsales
[view on eBay] 		Used 1
in stock		 $362.20
Description: Lam Research 715-130080-008 200mm Robot Arm End Effector Fork 4420 Working Spare
usedeqsales
[view on eBay] 		Used 2
in stock		 $651.21
Description: Lam Research 853-017620-001 Tri-Convectron Interface Assembly 4420 Rev. A Spare
usedeqsales
[view on eBay] 		Used 1
in stock		 $651.21
Description: Lam Research 853-017620-001 Tri-Convectron Interface 810-17007-001 4420 Spare
sgcequipment
[view on eBay] 		Used 1
in stock		 $300.00
Description: Lam Research Chamber Kit 4420 PN: 849-210029-001 (Missing Parts)
sgcequipment
[view on eBay] 		Used 2
in stock		 $1,000.00
Description: Lam Research Chamber Kit 4420 PN: 849-210029-001 Kit

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Historical Pricing Information

The following pricing information is available for this item.
VendorConditionSourceList PriceQuantity Sold ListedEnded
usedeqsales Used - $254.06 0 Aug/15/12 Feb/26/13
Description: Lam 4420 Deltron V300 DC Power Supply V300B working 853-017230-001
usedeqsales Used - $1,009.12 1 Sep/21/12 May/28/15
Description: Lam 4420 Pedestal Cylinder Lifter Assy 853-011661-001-H working 853-011632-001
usedeqsales Used - $702.12 1 Feb/29/12 Nov/06/13
Description: Lam Research 4420 Endpoint Detector 853-001983-005-H-PCBELE Used Working
usedeqsales Used - $808.12 2 Aug/20/12 Jul/08/21
Description: Lam Research 810-17031-2 ADIO A0 PCB Rev. 2 Rainbow 4420 Used Working
usedeqsales Used - $808.12 0 Aug/20/12 Sep/16/22
Description: Lam Research 810-17031-4 ADIO A0 PCB Rev. 2 Rainbow 4420 Used Working
usedeqsales Used - $1,008.12 0 Aug/20/12 Jan/11/13
Description: Lam Research 4420 853-012123-500-E1-230 Loadlock Chamber 715-011202-001 working
usedeqsales Used - $2,509.12 0 Sep/19/12 Dec/31/19
Description: LAM Research 4420 RF Generator Cart 852-014681-005-F working OEM-650A
usedeqsales Used - $754.56 1 Sep/19/12 Dec/12/13
Description: LAM Research 4420 RF Generator Cart 852-014681-005-J working OEM-650A
usedeqsales Used - $309.12 1 Sep/19/12 Jun/12/15
Description: Tylan Lam Research 4420 Manometer 853-017653-001-A-MDFT CMLA-11S02 Used Working
usedeqsales Used - $311.11 1 Nov/14/11 Nov/13/17
Description: LAM Research 4420 Loadlock Bottom View Assembly Parts 771-090453-001 working
usedeqsales Used - $1,203.12 2 Mar/13/12 Jan/21/15
Description: LAM Research 4420 Etcher Wafer Transport Assembly 853-012726-001 Rev.G Working
usedeqsales Used - $403.12 1 Mar/13/12 Feb/14/20
Description: Lam Research 4420 RF Switch Box 853-017163-001-D-3710 Used Working
usedeqsales Used - $803.12 0 Mar/14/12 Jan/20/14
Description: Lam Research 4420 DIP High Frequency Board 810-017003-004 Rev. B Used Working
usedeqsales Used - $282.18 1 Mar/14/12 Oct/06/13
Description: Lam Research 4420 RF Sense Box Autotune 853-025944-001-1-C221 Used Working
usedeqsales Used - $603.12 1 Mar/14/12 Feb/02/13
Description: Lam Research 4420 Transformer Assembly 853-025902-001-4-C474 Used Working
usedeqsales Used - $3,503.12 1 Mar/14/12 Apr/17/15
Description: LAM Research 4420 Etcher 853-024401-100-9 Orbital Gas Panel Assembly as-is
usedeqsales Used - $1,751.56 4 Mar/14/12 Jun/20/21
Description: Lam Research 853-024403-100-10 Orbital Gas Panel Assembly 4420 Etcher As-Is
usedeqsales Used - $1,003.12 0 Mar/14/12 Jun/03/22
Description: Lam Research 853-013610-001-D 4420 Solenoid Tray Assembly Used Working
athomemarket Used - $364.99 0 Nov/25/12 Dec/25/12
Description: LAM Research 853-025902-001 Transformer Assembly for ESC 4420
capitolareatech NEW - $55.00 0 Oct/22/12 Sep/17/13
Description: LAM RESEARCH 853-491159-001 CABLE RF 4420 A6
usedeqsales Used - $1,011.11 2 Nov/08/11 Dec/18/12
Description: LAM Research Lifter & Spinner Assembly 853-012525-001 Rev. E Working LAM 4420
athomemarket Used - $331.19 0 Dec/25/12 Jan/24/13
Description: LAM Research 853-025902-001 Transformer Assembly for ESC 4420
usedeqsales Used - $1,212.12 1 Dec/13/12 Jan/04/13
Description: LAM Research 4420 Etcher 853-012123-001-G-230D Harmonic Arm Drive Assembly used
usedeqsales Used - $610.12 1 Nov/01/12 Jan/13/13
Description: Lam 4420 Mykrolis AC-2 Valve Controller 796-006238-001 Rev.K working
usedeqsales Used - $705.68 1 Aug/10/12 Jan/13/13
Description: Lam 4420 Edge Sensor Assembly 853-012500-002-E-3117 Used Working
athomemarket Used - $367.99 1 Jan/24/13 Feb/22/13
Description: LAM Research 853-025902-001 Transformer Assembly for ESC 4420
hdsemispares NEW - $8.20 1 Jan/18/13 Jan/28/13
Description: Millipore Lam 4420 Throttle Valve MDVX-018S01
usedeqsales Used - $1,011.11 1 Mar/19/13 Sep/24/13
Description: LAM Research 4420 RF Match Gear Drive Assembly 853-015130-103 working
usedeqsales Used - $503.13 1 Mar/26/13 Jun/18/13
Description: Millipore CMHT-11S02 Manometer 685-008451-001 REV.D LAM 4420 Used Working
usedeqsales Used - $303.13 1 Mar/27/13 Oct/02/18
Description: Mykrolis CMHT110232E Manometer 853-011053-002 LAM 4420 Used Working
usedeqsales Used - $304.13 1 Apr/16/13 Apr/27/13
Description: Lam Research 713-011203-001 180 Degree Exit Loadlock Cover Rev.F 4420 Etcher
usedeqsales Used - $304.13 1 Apr/16/13 Sep/11/13
Description: Lam Research 713-011205-001 180 Degree Loadlock Cover Rev.G 4420 Etcher working
usedeqsales Used - $657.13 1 Jul/25/13 Sep/27/16
Description: LAM Research 853-001983-010 Endpoint Detector 4420 Rev. T Used Working
visionsemi NEW - $480.00 4 Apr/22/14 Oct/10/17
Description: LAM RESEARCH 716-018614-082 Focus Ring 200MM Jeida ESC 4420 NEW
dr.fantom Scrap, for parts - $250.00 0 May/28/14 Feb/12/15
Description: Millipore Lam 4420 Throttle Valve MDVX-018S01 839-013522-001
artsemi Used - $250.00 0 Jul/31/14 May/04/17
Description: Halo RF Interface PCB, VCI INTRF, Lam Research 810-034806-007 34806 4420 ARTSemi
usedeqsales Used - $808.14 2 Aug/20/14 Jan/21/20
Description: Lam Research 810-017075-003 Gas Panel Interlock PCB Rainbow 4420 Used Working
usedeqsales Used - $1,208.14 1 Aug/20/14 May/31/18
Description: LAM Research 853-012123-500-E1-230S Harmonic Arm Drive 715-130080-008 4420 Used
usedeqsales Used - $1,208.14 1 Aug/20/14 May/31/18
Description: Lam Research 853-012123-001-G-230S Harmonic Arm Drive 715-130092-008 4420 Used
usedeqsales Used - $655.28 4 Aug/27/14 Nov/14/23
Description: Lam Research 853-190023-001 Controller Assembly 272072-00 Lam Rainbow 4420 Used
artsemi Used - $2,400.00 0 Jul/29/14 Apr/01/15
Description: Deltron Power Supply, 11482XA, Lam Research 660-091821-001, 714-172540, 4420, PS
usedeqsales Used - $4,011.11 1 Jan/19/15 Apr/13/18
Description: Lam Research 715-011204-001 Harmonic Arm 852-011201-001-D Rainbow 4420 Used
dr.fantom Scrap, for parts - $120.00 1 Feb/12/15 Apr/19/18
Description: Millipore Lam 4420 Throttle Valve MDVX-018S01 839-013522-001
instechlab Used - $500.00 0 Mar/20/15 Apr/19/15
Description: Tylan Lam Research 4420 Manometer 853-017643-001 Cmla-11S02 Used Working
gti-semi Used - $420.00 0 Mar/24/15 Nov/26/19
Description: Lam, CLEANED 8" Wafer ENTRANCE ARM 4420, p/n 715-130080-006
instechlab Used - $500.00 0 Apr/19/15 May/19/15
Description: Tylan Lam Research 4420 Manometer 853-017643-001 Cmla-11S02 Used Working
usedeqsales Used - $1,011.11 4 Nov/07/11 Jul/10/18
Description: LAM Research 4420 Inner Gate Assembly 853-012261-001-4-230 working 853-12230-002
usedeqsales Used - $902.12 4 Feb/29/12 Feb/16/18
Description: LAM Research 853-012200-002-G-230S Inner Gate Valve Drive 4420 Used Working
usedeqsales Used - $902.12 1 Feb/29/12 Feb/16/18
Description: LAM 4420 Etcher Inner Gate Valve Drive 853-012200-002-H-DFT Working
usedeqsales Used - $1,011.11 2 Nov/07/11 Jan/26/18
Description: LAM Research 4420 853-012500-002-E-LEAN Edge Sensor Assembly 853-012500-002
usedeqsales Used - $1,011.11 2 Nov/07/11 Jun/21/19
Description: LAM Research 4420 853-012500R-002-E-ELM Edge Sensor Assembly 853-012500-002
usedeqsales Used - $911.12 5 Nov/02/12 Apr/24/15
Description: LAM 4420 Etcher 853-012200-002 Inner Gate Valve Drive working
usedeqsales Scrap, for parts - $1,005.13 1 May/08/13 Apr/22/15
Description: LAM 852-011060-503-F-CH9M Reaction and Lower Chamber Assembly 4420 As-Is
usedeqsales Used - $216.26 2 May/05/15 Mar/16/18
Description: Lam Research 713-013220-001 Outer Gate Entrance Safety Cover Rainbow 4420 Used
usedeqsales Used - $1,216.26 0 May/05/15 Dec/01/15
Description: Lam Research 713-011205-001 180 Degree Loadlock Cover Rev. F Rainbow 4420 Used
instechlab Used - $300.00 0 May/19/15 Jun/18/15
Description: Tylan Lam Research 4420 Manometer 853-017643-001 Cmla-11S02 Used Working
usedeqsales Used - $504.56 1 Jun/15/15 Dec/12/18
Description: Lam Research 853-011661-001-H Pedestal Cylinder Lift 4420 853-011632-001 Used
instechlab Used - $300.00 0 Jun/18/15 Jul/18/15
Description: Tylan Lam Research 4420 Manometer 853-017643-001 Cmla-11S02 Used Working
instechlab Used - $300.00 0 Jul/18/15 Aug/17/15
Description: Tylan Lam Research 4420 Manometer 853-017643-001 Cmla-11S02 Used Working
usedeqsales Used - $407.15 0 Aug/11/15 Dec/09/15
Description: Millipore MDVX-018S01 Throttle Valve Lam 853-013541-002 Rainbow 4420 Copper Used
instechlab Used - $200.00 0 Aug/17/15 Mar/29/16
Description: Tylan Lam Research 4420 Manometer 853-017643-001 Cmla-11S02 Used Working
usedeqsales Used - $511.11 2 Sep/30/15 May/22/19
Description: LAM Research 1-1/2" Isolation Valve 839-013521-001 Working LAM 4420
usedeqsales Used - $810.15 1 Oct/22/15 Dec/01/15
Description: Xycom 71110B-001 PCB Card PMXVME-110 Lam 810-017033-003 Rainbow 4420 Used
usedeqsales NEW - $812.15 1 Dec/14/15 Mar/15/17
Description: Lam Research 715-030136-004 6" 4420 MAJ FLAT ESC Edge Ring New
capitolareatech NEW - $55.00 0 Feb/25/16 Jun/24/16
Description: LAM RESEARCH 853-491159-001 CABLE RF 4420 A6
instechlab Used - $100.00 0 Mar/28/16 Apr/04/16
Description: Tylan Lam Research 4420 Manometer 853-017643-001 Cmla-11S02 Used Working
instechlab Used - $200.00 1 Apr/26/16 Jul/18/16
Description: Tylan Lam Research 4420 Manometer 853-017643-001 Cmla-11S02 Used Working
waste-not-recycling Used - $249.99 0 May/09/16 May/16/16
Description: Millipore MDVX-018S01 Millipore Lam 4420 Throttle Valve, 853-013541-002 Used
waste-not-recycling Used - $199.99 0 May/16/16 May/23/16
Description: Millipore MDVX-018S01 Millipore Lam 4420 Throttle Valve, 853-013541-002 Used
waste-not-recycling Used - $225.99 0 May/23/16 May/31/16
Description: Millipore MDVX-018S01 Millipore Lam 4420 Throttle Valve, 853-013541-002 Used
gigabitpartsolutions NEW - $385.00 0 Jun/09/16 Mar/29/17
Description: OEM Part CLAMP RING 4420 Lower LAM RESEARCH (LAM) 716-011623-001 REV F
jagg-ip Used - $1,000.00 0 Jun/14/16 Nov/09/18
Description: Lam Research 853-190023-001 Controller Assembly 272072-00 Lam Rainbow 4420
jagg-ip NEW - $800.00 0 Jun/14/16 Jun/09/17
Description: Lam Research 853-190023-001 Controller Assembly 272072-00 Lam Rainbow 4420
capitolareatech NEW - $55.00 0 Jul/09/16 Sep/15/16
Description: LAM RESEARCH 853-491159-001 CABLE RF 4420 A6
capitolareatech NEW - $55.00 0 Sep/20/16 Nov/19/16
Description: LAM RESEARCH 853-491159-001 CABLE RF 4420 A6
capitolareatech NEW - $55.00 0 Dec/20/16 Jun/20/20
Description: LAM RESEARCH 853-491159-001 CABLE RF 4420 A6
20041014625pm Used - $225.00 0 Jan/14/17 Jan/21/17
Description: Lam Research 852-011061-503 4420 Chamber Assembly
20041014625pm Used - $575.00 0 Jan/21/17 Mar/24/17
Description: Lam Research 852-011061-503 4420 Chamber Assembly
esl-elektronik NEW - $800.00 1 Mar/22/17 Sep/23/18
Description: Lam Research 715-030136-004 6" 4420 MAJ FLAT ESC Edge Ring New
alamedaauction NEW - $495.00 0 Jun/14/17 Jul/14/17
Description: NEW Lam Research 810-017035-001 Force SYS68K SASI-1 VME Board Rainbow 4420 Etch
alamedaauction NEW - $495.00 0 Jul/14/17 Aug/13/17
Description: NEW Lam Research 810-017035-001 Force SYS68K SASI-1 VME Board Rainbow 4420 Etch
alamedaauction NEW - $495.00 1 Aug/14/17 Aug/16/17
Description: NEW Lam Research 810-017035-001 Force SYS68K SASI-1 VME Board Rainbow 4420 Etch
logansemi NEW - $340.00 1 Sep/04/17 Aug/08/18
Description: Lam Research FOCUS RING, 6", 4420, P/N 715-140286-001
capitolareatech Used - $2,495.00 0 Mar/06/18 Aug/13/20
Description: LAM RESEARCH (LAM) 853-015130-002 LAM Research 4420 RF MATCH GEAR DRIVE ASSEMBL
20041014625pm Used - $295.00 0 Apr/08/18 Apr/15/18
Description: Lam Research 853-012261-001 Inner Gate Assembly 4420 Etcher Used
20041014625pm Used - $695.00 0 Apr/15/18 May/15/18
Description: Lam Research 853-012261-001 Inner Gate Assembly 4420 Etcher Used
usedeqsales Used - $2,005.55 1 May/08/18 Mar/22/22
Description: Lam Research 715-011204-001 Harmonic Arm 852-011201-001-D Rainbow 4420 Used
20041014625pm Used - $625.00 0 May/15/18 Jun/14/18
Description: Lam Research 853-012261-001 Inner Gate Assembly 4420 Etcher Used
capitolareatech NEW - $1,195.00 0 May/24/18 Aug/09/19
Description: LAM RESEARCH (LAM) 715-011001-002 Reaction Lower Chamber Assembly 4420 Rainbow
20041014625pm Used - $625.00 0 Jun/15/18 Jul/05/18
Description: Lam Research 853-012261-001 Inner Gate Assembly 4420 Etcher Used
20041014625pm Used - $200.00 0 Jul/05/18 Jul/12/18
Description: Lam Research 853-012261-001 Inner Gate Assembly 4420 Etcher Used
20041014625pm Used - $350.00 0 Jul/12/18 Jul/17/18
Description: Lam Research 853-012261-001 Inner Gate Assembly 4420 Etcher Used
20041014625pm Used - $525.00 0 Jul/17/18 Aug/01/18
Description: Lam Research 853-012261-001 Inner Gate Assembly 4420 Etcher Used
logansemi NEW - $550.00 1 Jan/14/19 Jun/11/20
Description: Lam Research 6" 4420 FOCUS RING, 715-140286-001 NOS
usedeqsales Used - $1,703.12 1 Apr/23/19 Oct/21/21
Description: Lam Research 852-011061-103 Reaction & Lower Chamber Lower Match Box 4420 As-Is
usedeqsales Used - $661.11 1 Jun/04/19 Oct/21/20
Description: MKS Instruments 100997144 Isolation Valve Lam Research 839-013521-001 4420 Used
logansemi NEW - $5,188.00 1 Jun/12/19 Jun/26/19
Description: LAM RESEARCH 4420 6" ESC UPPER ELECTRODE MAJOR FLAT , 718-092326-061, NOS
capitolareatech Used - $595.00 0 Dec/07/19 Aug/13/20
Description: LAM RESEARCH 853-013541-002 Millipore MDVX-018S01 Throttle Vlv Lam Rainbow 4420
getspares.com_sparesllc09 Used - $496.56 1 Jan/06/20 Dec/21/21
Description: 853-011661-001 / LAM 4420 PEDESTAL CYLINDER LIFTER ASSY / LAM
montevistagroup NEW - $1,975.00 0 Jul/25/20 Aug/04/20
Description: LAM RESEARCH RAINBOW (RB) 4520 4420 GAP DRIVE CONTROLLER Bd 810-017018-001
capitolareatech NEW - $93.95 0 Aug/17/20 Jul/03/24
Description: LAM RESEARCH 853-491159-001 CABLE RF 4420 A6
capitolareatech Used - $4,241.95 0 Aug/18/20 Jan/25/24
Description: LAM RESEARCH (LAM) 853-015130-002 LAM Research 4420 RF MATCH GEAR DRIVE ASSEMBL
capitolareatech NEW - $595.00 1 Aug/19/20 Oct/19/21
Description: LAM RESEARCH 853-013541-002 Millipore MDVX-018S01 Throttle Vlv Lam Rainbow 4420
usedeqsales Used - $1,010.20 5 Oct/13/20 Dec/23/20
Description: Force Computers 102205 PCB Card SYS68K/CPU-6A/C3 Lam 810-017034-300 4420 Working
getspares.com_sparesllc09 Used - $496.56 0 Jan/08/22 Jun/30/22
Description: 853-011661-001 /LAM 4420 PEDESTAL CYLINDER LIFTER ASSY/ LAM RESEARCH CORPORATION
usedeqsales Used - $1,823.65 0 May/03/22 Sep/16/22
Description: Lam Research 852-014681-005 RF Generator Cart ENI OEM-650A 4420 Tested Working
usedeqsales Used - $2,009.22 1 Sep/20/22 Oct/19/22
Description: Deltron V300B Quad Power Supply Lam Research 853-017230-001 4420 Working
sgcequipment Used - $100.00 0 Nov/17/22 Dec/18/23
Description: Lam Research PN: 714-110668-001
farmoninc Used - $4,500.00 0 Jan/27/23 Aug/31/23
Description: LAM 853-015130-002 LAM Research 4420 RF MATCH GEAR DRIVE ASSEMBELLY, 114129
tfstech Used - $89.99 0 Mar/08/23 Aug/29/23
Description: Lam Research 839-190104-001 Assembly Ground Strap FLT CA Rainbow 4420
tfstech Used - $149.99 0 Mar/08/23 Aug/29/23
Description: Lam Research 853-011834-001 Assembly Harness Thermostat Rainbow 4420

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