The following pricing information is available for this item. |
Vendor | Condition | Source | List Price | Quantity Sold |
Listed | Ended | |
usedeqsales |
Used |
- |
$254.06
|
0 |
Aug/15/12 |
Feb/26/13 |
|
Description: Lam 4420 Deltron V300 DC Power Supply V300B working 853-017230-001 |
usedeqsales |
Used |
- |
$1,009.12
|
1 |
Sep/21/12 |
May/28/15 |
|
Description: Lam 4420 Pedestal Cylinder Lifter Assy 853-011661-001-H working 853-011632-001 |
usedeqsales |
Used |
- |
$702.12
|
1 |
Feb/29/12 |
Nov/06/13 |
|
Description: Lam Research 4420 Endpoint Detector 853-001983-005-H-PCBELE Used Working |
usedeqsales |
Used |
- |
$808.12
|
2 |
Aug/20/12 |
Jul/08/21 |
|
Description: Lam Research 810-17031-2 ADIO A0 PCB Rev. 2 Rainbow 4420 Used Working |
usedeqsales |
Used |
- |
$808.12
|
0 |
Aug/20/12 |
Sep/16/22 |
|
Description: Lam Research 810-17031-4 ADIO A0 PCB Rev. 2 Rainbow 4420 Used Working |
usedeqsales |
Used |
- |
$1,008.12
|
0 |
Aug/20/12 |
Jan/11/13 |
|
Description: Lam Research 4420 853-012123-500-E1-230 Loadlock Chamber 715-011202-001 working |
usedeqsales |
Used |
- |
$2,509.12
|
0 |
Sep/19/12 |
Dec/31/19 |
|
Description: LAM Research 4420 RF Generator Cart 852-014681-005-F working OEM-650A |
usedeqsales |
Used |
- |
$754.56
|
1 |
Sep/19/12 |
Dec/12/13 |
|
Description: LAM Research 4420 RF Generator Cart 852-014681-005-J working OEM-650A |
usedeqsales |
Used |
- |
$309.12
|
1 |
Sep/19/12 |
Jun/12/15 |
|
Description: Tylan Lam Research 4420 Manometer 853-017653-001-A-MDFT CMLA-11S02 Used Working |
usedeqsales |
Used |
- |
$311.11
|
1 |
Nov/14/11 |
Nov/13/17 |
|
Description: LAM Research 4420 Loadlock Bottom View Assembly Parts 771-090453-001 working |
usedeqsales |
Used |
- |
$1,203.12
|
2 |
Mar/13/12 |
Jan/21/15 |
|
Description: LAM Research 4420 Etcher Wafer Transport Assembly 853-012726-001 Rev.G Working |
usedeqsales |
Used |
- |
$403.12
|
1 |
Mar/13/12 |
Feb/14/20 |
|
Description: Lam Research 4420 RF Switch Box 853-017163-001-D-3710 Used Working |
usedeqsales |
Used |
- |
$803.12
|
0 |
Mar/14/12 |
Jan/20/14 |
|
Description: Lam Research 4420 DIP High Frequency Board 810-017003-004 Rev. B Used Working |
usedeqsales |
Used |
- |
$282.18
|
1 |
Mar/14/12 |
Oct/06/13 |
|
Description: Lam Research 4420 RF Sense Box Autotune 853-025944-001-1-C221 Used Working |
usedeqsales |
Used |
- |
$603.12
|
1 |
Mar/14/12 |
Feb/02/13 |
|
Description: Lam Research 4420 Transformer Assembly 853-025902-001-4-C474 Used Working |
usedeqsales |
Used |
- |
$3,503.12
|
1 |
Mar/14/12 |
Apr/17/15 |
|
Description: LAM Research 4420 Etcher 853-024401-100-9 Orbital Gas Panel Assembly as-is |
usedeqsales |
Used |
- |
$1,751.56
|
4 |
Mar/14/12 |
Jun/20/21 |
|
Description: Lam Research 853-024403-100-10 Orbital Gas Panel Assembly 4420 Etcher As-Is |
usedeqsales |
Used |
- |
$1,003.12
|
0 |
Mar/14/12 |
Jun/03/22 |
|
Description: Lam Research 853-013610-001-D 4420 Solenoid Tray Assembly Used Working |
athomemarket |
Used |
- |
$364.99
|
0 |
Nov/25/12 |
Dec/25/12 |
|
Description: LAM Research 853-025902-001 Transformer Assembly for ESC 4420 |
capitolareatech |
NEW |
- |
$55.00
|
0 |
Oct/22/12 |
Sep/17/13 |
|
Description: LAM RESEARCH 853-491159-001 CABLE RF 4420 A6 |
usedeqsales |
Used |
- |
$1,011.11
|
2 |
Nov/08/11 |
Dec/18/12 |
|
Description: LAM Research Lifter & Spinner Assembly 853-012525-001 Rev. E Working LAM 4420 |
athomemarket |
Used |
- |
$331.19
|
0 |
Dec/25/12 |
Jan/24/13 |
|
Description: LAM Research 853-025902-001 Transformer Assembly for ESC 4420 |
usedeqsales |
Used |
- |
$1,212.12
|
1 |
Dec/13/12 |
Jan/04/13 |
|
Description: LAM Research 4420 Etcher 853-012123-001-G-230D Harmonic Arm Drive Assembly used |
usedeqsales |
Used |
- |
$610.12
|
1 |
Nov/01/12 |
Jan/13/13 |
|
Description: Lam 4420 Mykrolis AC-2 Valve Controller 796-006238-001 Rev.K working |
usedeqsales |
Used |
- |
$705.68
|
1 |
Aug/10/12 |
Jan/13/13 |
|
Description: Lam 4420 Edge Sensor Assembly 853-012500-002-E-3117 Used Working |
athomemarket |
Used |
- |
$367.99
|
1 |
Jan/24/13 |
Feb/22/13 |
|
Description: LAM Research 853-025902-001 Transformer Assembly for ESC 4420 |
hdsemispares |
NEW |
- |
$8.20
|
1 |
Jan/18/13 |
Jan/28/13 |
|
Description: Millipore Lam 4420 Throttle Valve MDVX-018S01 |
usedeqsales |
Used |
- |
$1,011.11
|
1 |
Mar/19/13 |
Sep/24/13 |
|
Description: LAM Research 4420 RF Match Gear Drive Assembly 853-015130-103 working |
usedeqsales |
Used |
- |
$503.13
|
1 |
Mar/26/13 |
Jun/18/13 |
|
Description: Millipore CMHT-11S02 Manometer 685-008451-001 REV.D LAM 4420 Used Working |
usedeqsales |
Used |
- |
$303.13
|
1 |
Mar/27/13 |
Oct/02/18 |
|
Description: Mykrolis CMHT110232E Manometer 853-011053-002 LAM 4420 Used Working |
usedeqsales |
Used |
- |
$304.13
|
1 |
Apr/16/13 |
Apr/27/13 |
|
Description: Lam Research 713-011203-001 180 Degree Exit Loadlock Cover Rev.F 4420 Etcher |
usedeqsales |
Used |
- |
$304.13
|
1 |
Apr/16/13 |
Sep/11/13 |
|
Description: Lam Research 713-011205-001 180 Degree Loadlock Cover Rev.G 4420 Etcher working |
usedeqsales |
Used |
- |
$657.13
|
1 |
Jul/25/13 |
Sep/27/16 |
|
Description: LAM Research 853-001983-010 Endpoint Detector 4420 Rev. T Used Working |
visionsemi |
NEW |
- |
$480.00
|
4 |
Apr/22/14 |
Oct/10/17 |
|
Description: LAM RESEARCH 716-018614-082 Focus Ring 200MM Jeida ESC 4420 NEW |
dr.fantom |
Scrap, for parts |
- |
$250.00
|
0 |
May/28/14 |
Feb/12/15 |
|
Description: Millipore Lam 4420 Throttle Valve MDVX-018S01 839-013522-001 |
artsemi |
Used |
- |
$250.00
|
0 |
Jul/31/14 |
May/04/17 |
|
Description: Halo RF Interface PCB, VCI INTRF, Lam Research 810-034806-007 34806 4420 ARTSemi |
usedeqsales |
Used |
- |
$808.14
|
2 |
Aug/20/14 |
Jan/21/20 |
|
Description: Lam Research 810-017075-003 Gas Panel Interlock PCB Rainbow 4420 Used Working |
usedeqsales |
Used |
- |
$1,208.14
|
1 |
Aug/20/14 |
May/31/18 |
|
Description: LAM Research 853-012123-500-E1-230S Harmonic Arm Drive 715-130080-008 4420 Used |
usedeqsales |
Used |
- |
$1,208.14
|
1 |
Aug/20/14 |
May/31/18 |
|
Description: Lam Research 853-012123-001-G-230S Harmonic Arm Drive 715-130092-008 4420 Used |
usedeqsales |
Used |
- |
$655.28
|
4 |
Aug/27/14 |
Nov/14/23 |
|
Description: Lam Research 853-190023-001 Controller Assembly 272072-00 Lam Rainbow 4420 Used |
artsemi |
Used |
- |
$2,400.00
|
0 |
Jul/29/14 |
Apr/01/15 |
|
Description: Deltron Power Supply, 11482XA, Lam Research 660-091821-001, 714-172540, 4420, PS |
usedeqsales |
Used |
- |
$4,011.11
|
1 |
Jan/19/15 |
Apr/13/18 |
|
Description: Lam Research 715-011204-001 Harmonic Arm 852-011201-001-D Rainbow 4420 Used |
dr.fantom |
Scrap, for parts |
- |
$120.00
|
1 |
Feb/12/15 |
Apr/19/18 |
|
Description: Millipore Lam 4420 Throttle Valve MDVX-018S01 839-013522-001 |
instechlab |
Used |
- |
$500.00
|
0 |
Mar/20/15 |
Apr/19/15 |
|
Description: Tylan Lam Research 4420 Manometer 853-017643-001 Cmla-11S02 Used Working |
gti-semi |
Used |
- |
$420.00
|
0 |
Mar/24/15 |
Nov/26/19 |
|
Description: Lam, CLEANED 8" Wafer ENTRANCE ARM 4420, p/n 715-130080-006 |
instechlab |
Used |
- |
$500.00
|
0 |
Apr/19/15 |
May/19/15 |
|
Description: Tylan Lam Research 4420 Manometer 853-017643-001 Cmla-11S02 Used Working |
usedeqsales |
Used |
- |
$1,011.11
|
4 |
Nov/07/11 |
Jul/10/18 |
|
Description: LAM Research 4420 Inner Gate Assembly 853-012261-001-4-230 working 853-12230-002 |
usedeqsales |
Used |
- |
$902.12
|
4 |
Feb/29/12 |
Feb/16/18 |
|
Description: LAM Research 853-012200-002-G-230S Inner Gate Valve Drive 4420 Used Working |
usedeqsales |
Used |
- |
$902.12
|
1 |
Feb/29/12 |
Feb/16/18 |
|
Description: LAM 4420 Etcher Inner Gate Valve Drive 853-012200-002-H-DFT Working |
usedeqsales |
Used |
- |
$1,011.11
|
2 |
Nov/07/11 |
Jan/26/18 |
|
Description: LAM Research 4420 853-012500-002-E-LEAN Edge Sensor Assembly 853-012500-002 |
usedeqsales |
Used |
- |
$1,011.11
|
2 |
Nov/07/11 |
Jun/21/19 |
|
Description: LAM Research 4420 853-012500R-002-E-ELM Edge Sensor Assembly 853-012500-002 |
usedeqsales |
Used |
- |
$911.12
|
5 |
Nov/02/12 |
Apr/24/15 |
|
Description: LAM 4420 Etcher 853-012200-002 Inner Gate Valve Drive working |
usedeqsales |
Scrap, for parts |
- |
$1,005.13
|
1 |
May/08/13 |
Apr/22/15 |
|
Description: LAM 852-011060-503-F-CH9M Reaction and Lower Chamber Assembly 4420 As-Is |
usedeqsales |
Used |
- |
$216.26
|
2 |
May/05/15 |
Mar/16/18 |
|
Description: Lam Research 713-013220-001 Outer Gate Entrance Safety Cover Rainbow 4420 Used |
usedeqsales |
Used |
- |
$1,216.26
|
0 |
May/05/15 |
Dec/01/15 |
|
Description: Lam Research 713-011205-001 180 Degree Loadlock Cover Rev. F Rainbow 4420 Used |
instechlab |
Used |
- |
$300.00
|
0 |
May/19/15 |
Jun/18/15 |
|
Description: Tylan Lam Research 4420 Manometer 853-017643-001 Cmla-11S02 Used Working |
usedeqsales |
Used |
- |
$504.56
|
1 |
Jun/15/15 |
Dec/12/18 |
|
Description: Lam Research 853-011661-001-H Pedestal Cylinder Lift 4420 853-011632-001 Used |
instechlab |
Used |
- |
$300.00
|
0 |
Jun/18/15 |
Jul/18/15 |
|
Description: Tylan Lam Research 4420 Manometer 853-017643-001 Cmla-11S02 Used Working |
instechlab |
Used |
- |
$300.00
|
0 |
Jul/18/15 |
Aug/17/15 |
|
Description: Tylan Lam Research 4420 Manometer 853-017643-001 Cmla-11S02 Used Working |
usedeqsales |
Used |
- |
$407.15
|
0 |
Aug/11/15 |
Dec/09/15 |
|
Description: Millipore MDVX-018S01 Throttle Valve Lam 853-013541-002 Rainbow 4420 Copper Used |
instechlab |
Used |
- |
$200.00
|
0 |
Aug/17/15 |
Mar/29/16 |
|
Description: Tylan Lam Research 4420 Manometer 853-017643-001 Cmla-11S02 Used Working |
usedeqsales |
Used |
- |
$511.11
|
2 |
Sep/30/15 |
May/22/19 |
|
Description: LAM Research 1-1/2" Isolation Valve 839-013521-001 Working LAM 4420 |
usedeqsales |
Used |
- |
$810.15
|
1 |
Oct/22/15 |
Dec/01/15 |
|
Description: Xycom 71110B-001 PCB Card PMXVME-110 Lam 810-017033-003 Rainbow 4420 Used |
usedeqsales |
NEW |
- |
$812.15
|
1 |
Dec/14/15 |
Mar/15/17 |
|
Description: Lam Research 715-030136-004 6" 4420 MAJ FLAT ESC Edge Ring New |
capitolareatech |
NEW |
- |
$55.00
|
0 |
Feb/25/16 |
Jun/24/16 |
|
Description: LAM RESEARCH 853-491159-001 CABLE RF 4420 A6 |
instechlab |
Used |
- |
$100.00
|
0 |
Mar/28/16 |
Apr/04/16 |
|
Description: Tylan Lam Research 4420 Manometer 853-017643-001 Cmla-11S02 Used Working |
instechlab |
Used |
- |
$200.00
|
1 |
Apr/26/16 |
Jul/18/16 |
|
Description: Tylan Lam Research 4420 Manometer 853-017643-001 Cmla-11S02 Used Working |
waste-not-recycling |
Used |
- |
$249.99
|
0 |
May/09/16 |
May/16/16 |
|
Description: Millipore MDVX-018S01 Millipore Lam 4420 Throttle Valve, 853-013541-002 Used |
waste-not-recycling |
Used |
- |
$199.99
|
0 |
May/16/16 |
May/23/16 |
|
Description: Millipore MDVX-018S01 Millipore Lam 4420 Throttle Valve, 853-013541-002 Used |
waste-not-recycling |
Used |
- |
$225.99
|
0 |
May/23/16 |
May/31/16 |
|
Description: Millipore MDVX-018S01 Millipore Lam 4420 Throttle Valve, 853-013541-002 Used |
gigabitpartsolutions |
NEW |
- |
$385.00
|
0 |
Jun/09/16 |
Mar/29/17 |
|
Description: OEM Part CLAMP RING 4420 Lower LAM RESEARCH (LAM) 716-011623-001 REV F |
jagg-ip |
Used |
- |
$1,000.00
|
0 |
Jun/14/16 |
Nov/09/18 |
|
Description: Lam Research 853-190023-001 Controller Assembly 272072-00 Lam Rainbow 4420 |
jagg-ip |
NEW |
- |
$800.00
|
0 |
Jun/14/16 |
Jun/09/17 |
|
Description: Lam Research 853-190023-001 Controller Assembly 272072-00 Lam Rainbow 4420 |
capitolareatech |
NEW |
- |
$55.00
|
0 |
Jul/09/16 |
Sep/15/16 |
|
Description: LAM RESEARCH 853-491159-001 CABLE RF 4420 A6 |
capitolareatech |
NEW |
- |
$55.00
|
0 |
Sep/20/16 |
Nov/19/16 |
|
Description: LAM RESEARCH 853-491159-001 CABLE RF 4420 A6 |
capitolareatech |
NEW |
- |
$55.00
|
0 |
Dec/20/16 |
Jun/20/20 |
|
Description: LAM RESEARCH 853-491159-001 CABLE RF 4420 A6 |
20041014625pm |
Used |
- |
$225.00
|
0 |
Jan/14/17 |
Jan/21/17 |
|
Description: Lam Research 852-011061-503 4420 Chamber Assembly |
20041014625pm |
Used |
- |
$575.00
|
0 |
Jan/21/17 |
Mar/24/17 |
|
Description: Lam Research 852-011061-503 4420 Chamber Assembly |
esl-elektronik |
NEW |
- |
$800.00
|
1 |
Mar/22/17 |
Sep/23/18 |
|
Description: Lam Research 715-030136-004 6" 4420 MAJ FLAT ESC Edge Ring New |
alamedaauction |
NEW |
- |
$495.00
|
0 |
Jun/14/17 |
Jul/14/17 |
|
Description: NEW Lam Research 810-017035-001 Force SYS68K SASI-1 VME Board Rainbow 4420 Etch |
alamedaauction |
NEW |
- |
$495.00
|
0 |
Jul/14/17 |
Aug/13/17 |
|
Description: NEW Lam Research 810-017035-001 Force SYS68K SASI-1 VME Board Rainbow 4420 Etch |
alamedaauction |
NEW |
- |
$495.00
|
1 |
Aug/14/17 |
Aug/16/17 |
|
Description: NEW Lam Research 810-017035-001 Force SYS68K SASI-1 VME Board Rainbow 4420 Etch |
logansemi |
NEW |
- |
$340.00
|
1 |
Sep/04/17 |
Aug/08/18 |
|
Description: Lam Research FOCUS RING, 6", 4420, P/N 715-140286-001 |
capitolareatech |
Used |
- |
$2,495.00
|
0 |
Mar/06/18 |
Aug/13/20 |
|
Description: LAM RESEARCH (LAM) 853-015130-002 LAM Research 4420 RF MATCH GEAR DRIVE ASSEMBL |
20041014625pm |
Used |
- |
$295.00
|
0 |
Apr/08/18 |
Apr/15/18 |
|
Description: Lam Research 853-012261-001 Inner Gate Assembly 4420 Etcher Used |
20041014625pm |
Used |
- |
$695.00
|
0 |
Apr/15/18 |
May/15/18 |
|
Description: Lam Research 853-012261-001 Inner Gate Assembly 4420 Etcher Used |
usedeqsales |
Used |
- |
$2,005.55
|
1 |
May/08/18 |
Mar/22/22 |
|
Description: Lam Research 715-011204-001 Harmonic Arm 852-011201-001-D Rainbow 4420 Used |
20041014625pm |
Used |
- |
$625.00
|
0 |
May/15/18 |
Jun/14/18 |
|
Description: Lam Research 853-012261-001 Inner Gate Assembly 4420 Etcher Used |
capitolareatech |
NEW |
- |
$1,195.00
|
0 |
May/24/18 |
Aug/09/19 |
|
Description: LAM RESEARCH (LAM) 715-011001-002 Reaction Lower Chamber Assembly 4420 Rainbow |
20041014625pm |
Used |
- |
$625.00
|
0 |
Jun/15/18 |
Jul/05/18 |
|
Description: Lam Research 853-012261-001 Inner Gate Assembly 4420 Etcher Used |
20041014625pm |
Used |
- |
$200.00
|
0 |
Jul/05/18 |
Jul/12/18 |
|
Description: Lam Research 853-012261-001 Inner Gate Assembly 4420 Etcher Used |
20041014625pm |
Used |
- |
$350.00
|
0 |
Jul/12/18 |
Jul/17/18 |
|
Description: Lam Research 853-012261-001 Inner Gate Assembly 4420 Etcher Used |
20041014625pm |
Used |
- |
$525.00
|
0 |
Jul/17/18 |
Aug/01/18 |
|
Description: Lam Research 853-012261-001 Inner Gate Assembly 4420 Etcher Used |
logansemi |
NEW |
- |
$550.00
|
1 |
Jan/14/19 |
Jun/11/20 |
|
Description: Lam Research 6" 4420 FOCUS RING, 715-140286-001 NOS |
usedeqsales |
Used |
- |
$1,703.12
|
1 |
Apr/23/19 |
Oct/21/21 |
|
Description: Lam Research 852-011061-103 Reaction & Lower Chamber Lower Match Box 4420 As-Is |
usedeqsales |
Used |
- |
$661.11
|
1 |
Jun/04/19 |
Oct/21/20 |
|
Description: MKS Instruments 100997144 Isolation Valve Lam Research 839-013521-001 4420 Used |
logansemi |
NEW |
- |
$5,188.00
|
1 |
Jun/12/19 |
Jun/26/19 |
|
Description: LAM RESEARCH 4420 6" ESC UPPER ELECTRODE MAJOR FLAT , 718-092326-061, NOS |
capitolareatech |
Used |
- |
$595.00
|
0 |
Dec/07/19 |
Aug/13/20 |
|
Description: LAM RESEARCH 853-013541-002 Millipore MDVX-018S01 Throttle Vlv Lam Rainbow 4420 |
getspares.com_sparesllc09 |
Used |
- |
$496.56
|
1 |
Jan/06/20 |
Dec/21/21 |
|
Description: 853-011661-001 / LAM 4420 PEDESTAL CYLINDER LIFTER ASSY / LAM |
montevistagroup |
NEW |
- |
$1,975.00
|
0 |
Jul/25/20 |
Aug/04/20 |
|
Description: LAM RESEARCH RAINBOW (RB) 4520 4420 GAP DRIVE CONTROLLER Bd 810-017018-001 |
capitolareatech |
NEW |
- |
$93.95
|
0 |
Aug/17/20 |
Jul/03/24 |
|
Description: LAM RESEARCH 853-491159-001 CABLE RF 4420 A6 |
capitolareatech |
Used |
- |
$4,241.95
|
0 |
Aug/18/20 |
Jan/25/24 |
|
Description: LAM RESEARCH (LAM) 853-015130-002 LAM Research 4420 RF MATCH GEAR DRIVE ASSEMBL |
capitolareatech |
NEW |
- |
$595.00
|
1 |
Aug/19/20 |
Oct/19/21 |
|
Description: LAM RESEARCH 853-013541-002 Millipore MDVX-018S01 Throttle Vlv Lam Rainbow 4420 |
usedeqsales |
Used |
- |
$1,010.20
|
5 |
Oct/13/20 |
Dec/23/20 |
|
Description: Force Computers 102205 PCB Card SYS68K/CPU-6A/C3 Lam 810-017034-300 4420 Working |
getspares.com_sparesllc09 |
Used |
- |
$496.56
|
0 |
Jan/08/22 |
Jun/30/22 |
|
Description: 853-011661-001 /LAM 4420 PEDESTAL CYLINDER LIFTER ASSY/ LAM RESEARCH CORPORATION |
usedeqsales |
Used |
- |
$1,823.65
|
0 |
May/03/22 |
Sep/16/22 |
|
Description: Lam Research 852-014681-005 RF Generator Cart ENI OEM-650A 4420 Tested Working |
usedeqsales |
Used |
- |
$2,009.22
|
1 |
Sep/20/22 |
Oct/19/22 |
|
Description: Deltron V300B Quad Power Supply Lam Research 853-017230-001 4420 Working |
sgcequipment |
Used |
- |
$100.00
|
0 |
Nov/17/22 |
Dec/18/23 |
|
Description: Lam Research PN: 714-110668-001 |
farmoninc |
Used |
- |
$4,500.00
|
0 |
Jan/27/23 |
Aug/31/23 |
|
Description: LAM 853-015130-002 LAM Research 4420 RF MATCH GEAR DRIVE ASSEMBELLY, 114129 |
tfstech |
Used |
- |
$89.99
|
0 |
Mar/08/23 |
Aug/29/23 |
|
Description: Lam Research 839-190104-001 Assembly Ground Strap FLT CA Rainbow 4420 |
tfstech |
Used |
- |
$149.99
|
0 |
Mar/08/23 |
Aug/29/23 |
|
Description: Lam Research 853-011834-001 Assembly Harness Thermostat Rainbow 4420 |