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The following vendors have this item available.
usedeqsales
[view on eBay]
Used 1
in stock
$711.11
Description: Lam Research 853-011117-001 Upper Chamber Parts Lot 010250C1-AO01E 4420 Used
farmoninc
[view on eBay]
Used 1
in stock
$7,500.00
Description: AMAT 0010-18202 HDPCVD Ultima Chamber Upper Chamber
gigabitpartsolutions
[view on eBay]
Used 6
in stock
$438.90
Description: OEM Part (LAM) 715-801021-801 Liner 2300 upper chamber coated 300mm
j316gallery
[view on eBay]
Used 2
in stock
$4,334.51
Description: 16038 APPLIED MATERIALS CABLE ASSY LAMP POWER UPPER CHAMBER MODU 0150-35237
semiconusa
[view on eBay]
Used 2
in stock
$9,959.00
Description: AMAT 0040-02544 Upper Chamber DPS Metal DPS Plus
farmoninc
[view on eBay]
NEW 1
in stock
$1,100.00
Description: NEW AMAT 0021-14199 Cover, Upper Chamber, 300MM DPS II, 326428
grandbirdnet
[view on eBay]
NEW 10
in stock
$100.00
Description: AMAT 0270-02080 BLANK OFF PLATE,WATER MANIFOLD, UPPER CHAMBER 300MM DPS2 NEW
eisale1535
[view on eBay]
Used 1
in stock
$18,990.00
Description: AMAT 0040-82711, DPS 01,AMAT 0010-58838A UPPER Chamber Assy
usedeqsales
[view on eBay]
Used 1
in stock
$905.21
Description: AMAT Applied Materials 0010-36413 Upper Chamber DPS Lifting Tool Assembly Spare
capitolareatech
[view on eBay]
NEW 1
in stock
$29.95
Description: Applied Materials AMAT 0020-33803 PAD FOOT UPPER CHAMBER DPS MEC
powersell007
[view on eBay]
Used 1
in stock
$9,799.00
Description: APPLIED MATERIALS 0040-52662 UPPER CHAMBER ASSY, DPS, METAL AMAT
powersell007
[view on eBay]
Used 1
in stock
$10,999.00
Description: APPLIED MATERIALS 0040-81156 UPPER CHAMBER LINER 300MM DPS2 AMAT
powersell007
[view on eBay]
Used 1
in stock
$14,999.00
Description: APPLIED MATERIALS 0020-33806 UPPER CHAMBER ASSY DPS AMAT *UNUSED, SEALED*
getspares.com_sparesllc09
[view on eBay]
Used 1
in stock
$7,503.26
Description: 0021-55308 / CENTURA CENTRIS DPS2 UPPER CHAMBER LINER / APPLIED MATERIALS AMAT
spsglobal
[view on eBay]
Used 1
in stock
$100.00
Description: 209-0401 AMAT APPLIED 0021-13741 (#1) PLENUM WATER, UPPER CHAMBER, 300MM [ASIS]
j316gallery
[view on eBay]
NEW 1
in stock
$249.28
Description: 29488 APPLIED MATERIALS PLENUM WATER, UPPER CHAMBER, 300MM (NEW) 0021-13741
getspares.com_sparesllc09
[view on eBay]
Used 1
in stock
$1,260.59
Description: 0050-51984 / WELDMENT, PROCESS UPPER CHAMBER (2.65) / APPLIED MATERIALS AMAT
farmoninc
[view on eBay]
NEW 1
in stock
$650.00
Description: AMAT 0240-37688 KIT, O-RING UPPER CHAMBER,POLY DPS,3700-01959. 3700-01416 104638
j316gallery
[view on eBay]
Used 1
in stock
$9,956.00
Description: 9795 APPLIED MATERIALS YTTRIA COATED UPPER CHAMBER 0040-02544
jtechsemi
[view on eBay]
Used 1
in stock
$25,000.00
Description: Applied Materials 0040-61531 UPPER CHAMBER, COATED, 200MM DPN AMAT

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United States of America Thursday, Nov/21/2024 at 3:31 am CST
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Singapore Thursday, Nov/21/2024 at 3:16 am CST
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Taiwan (Province of China) Thursday, Nov/21/2024 at 3:13 am CST
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Taiwan (Province of China) Thursday, Nov/21/2024 at 3:11 am CST
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Korea (Republic of) Thursday, Nov/21/2024 at 3:10 am CST
Taiwan (Province of China) Thursday, Nov/21/2024 at 3:08 am CST

Historical Pricing Information

The following pricing information is available for this item.
VendorConditionSourceList PriceQuantity Sold ListedEnded
semiconusa Used - $4,000.00 1 Aug/22/12 Sep/06/12
Description: AMAT DPS Metal Upper Chamber 0040-02544
pohyh Used - $3,500.00 0 Jan/15/13 Feb/14/13
Description: AMAT Upper Chamber Assy. 0021-09601 (s/n 30056500-037-0003)
pohyh Used - $3,500.00 0 Jan/15/13 Feb/14/13
Description: AMAT Upper Chamber Assy. 0021-09601 (s/n 30056500-057-0002)
pohyh Used - $3,500.00 0 Jan/15/13 Feb/14/13
Description: AMAT Upper Chamber Assy. 0021-09601 (s/n 3011602-151-0001)
pohyh Used - $3,500.00 0 Jan/15/13 Feb/14/13
Description: AMAT Upper Chamber Assy. 0021-09601 (s/n 3011602-311-0002)
pohyh Used - $3,500.00 0 Jan/15/13 Feb/14/13
Description: AMAT Upper Chamber Assy. 0021-09601 (s/n 3011602-461-0001)
pohyh Used - $3,500.00 0 Feb/18/13 Mar/20/13
Description: AMAT Upper Chamber Assy. 0021-09601 (s/n 3011602-461-0001)
pohyh Used - $3,500.00 0 Feb/18/13 Mar/20/13
Description: AMAT Upper Chamber Assy. 0021-09601 (s/n 3011602-311-0002)
pohyh Used - $3,500.00 0 Feb/18/13 Mar/20/13
Description: AMAT Upper Chamber Assy. 0021-09601 (s/n 3011602-151-0001)
pohyh Used - $3,500.00 0 Feb/18/13 Mar/20/13
Description: AMAT Upper Chamber Assy. 0021-09601 (s/n 30056500-057-0002)
pohyh Used - $3,500.00 0 Feb/18/13 Mar/20/13
Description: AMAT Upper Chamber Assy. 0021-09601 (s/n 30056500-037-0003)
pohyh Used - $3,500.00 0 Mar/21/13 Apr/20/13
Description: AMAT Upper Chamber Assy. 0021-09601 (s/n 3011602-151-0001)
pohyh Used - $3,500.00 0 Mar/21/13 Apr/20/13
Description: AMAT Upper Chamber Assy. 0021-09601 (s/n 30056500-057-0002)
pohyh Used - $3,500.00 0 Mar/21/13 Apr/20/13
Description: AMAT Upper Chamber Assy. 0021-09601 (s/n 30056500-037-0003)
pohyh Used - $3,500.00 0 Mar/21/13 Apr/18/13
Description: AMAT Upper Chamber Assy. 0021-09601 (s/n 3011602-461-0001)
pohyh Used - $3,500.00 0 Mar/21/13 Apr/18/13
Description: AMAT Upper Chamber Assy. 0021-09601 (s/n 3011602-311-0002)
gesemiconductor Used - $10,500.00 1 May/29/13 Nov/29/16
Description: Applied Materials 0020-33806 DPS+ Poly Upper Chamber Body
gesemiconductor Used - $10,500.00 0 May/29/13 Feb/16/15
Description: Applied Materials 0021-01421 DPS Metal Upper Chamber Body
gesemiconductor Used - $8,500.00 2 May/29/13 Jul/03/13
Description: Applied Materials 0040-02544 DPS Metal Upper Chamber Body
pohyh Used - $3,500.00 0 Jun/04/13 Jun/23/14
Description: AMAT Upper Chamber Assy. 0021-09601 (s/n 3011602-151-0001)
j316gallery Used - $3,500.00 0 Jun/04/13 Jun/23/14
Description: B184 AMAT Upper Chamber Assy. 0021-09601 (s/n 30056500-057-0002)
gesemiconductor Used - $8,500.00 0 Aug/22/13 Apr/02/15
Description: Applied Materials 0021-01421 DPS Metal Upper Chamber Body (non-assembly)
jammin928 Used - $4,500.00 0 Sep/20/13 Oct/20/13
Description: Lam Research Hinged DSQ Upper chamber assebly 853-347019-605
imca00 NEW - $4,499.00 0 Oct/08/13 Oct/13/13
Description: Applied Materials AMAT DPN Upper Chamber 0040-61531 NEW IN CRATE
imca00 NEW - $4,499.00 0 Oct/20/13 Oct/25/13
Description: Applied Materials AMAT DPN Upper Chamber 0040-61531 NEW IN CRATE
imca00 NEW - $3,999.00 0 Oct/28/13 Nov/07/13
Description: Applied Materials AMAT DPN Upper Chamber 0040-61531 NEW IN CRATE
imca00 NEW - $3,999.00 0 Nov/21/13 Dec/01/13
Description: Applied Materials AMAT DPN Upper Chamber 0040-61531 NEW IN CRATE
imca00 NEW - $4,500.00 0 Feb/19/14 Feb/24/14
Description: Applied Materials AMAT DPN Upper Chamber Body 0040-61531 NEW IN CRATE
imca00 NEW - $4,500.00 0 Feb/24/14 Mar/01/14
Description: Applied Materials AMAT DPN Upper Chamber Body 0040-61531 NEW IN CRATE
imca00 NEW - $4,500.00 0 Apr/02/14 Apr/07/14
Description: Applied Materials AMAT DPN Upper Chamber Body 0040-61531 NEW IN CRATE
imca00 NEW - $4,500.00 0 Apr/07/14 Apr/12/14
Description: Applied Materials AMAT DPN Upper Chamber Body 0040-61531 NEW IN CRATE
imca00 NEW - $4,500.00 0 Apr/12/14 Apr/17/14
Description: Applied Materials AMAT DPN Upper Chamber Body 0040-61531 NEW IN CRATE
imca00 NEW - $4,500.00 0 Apr/17/14 Apr/22/14
Description: Applied Materials AMAT DPN Upper Chamber Body 0040-61531 NEW IN CRATE
imca00 NEW - $4,500.00 0 May/30/14 Jun/04/14
Description: Applied Materials AMAT DPN Upper Chamber Body 0040-61531 NEW IN CRATE
imca00 NEW - $4,500.00 0 Jul/28/14 Aug/02/14
Description: Applied Materials AMAT DPN Upper Chamber Body 0040-61531 NEW IN CRATE
imca00 NEW - $4,500.00 0 Aug/02/14 Aug/07/14
Description: Applied Materials AMAT DPN Upper Chamber Body 0040-61531 NEW IN CRATE
imca00 NEW - $4,500.00 0 Aug/07/14 Aug/12/14
Description: Applied Materials AMAT DPN Upper Chamber Body 0040-61531 NEW IN CRATE
used1eqsales NEW - $2,003.15 0 Mar/09/15 May/26/17
Description: AMAT 0040-48435 Upper Chamber Adapter 300mm SIP new surplus
gesemiconductor Used - $1,700.00 0 Mar/11/15 Dec/19/17
Description: APPLIED MATERIALS 0021-00540 DPS UPPER CHAMBER LID
asmtk Used - $20,000.00 0 Mar/30/15 Oct/01/21
Description: applied materials 0021-09601 DPS METAL UPPER CHAMBER FULL A COATING AMAT
gigabitpartsolutions Used - $438.90 2 May/08/15 Mar/04/21
Description: OEM Part LAM RESEARCH (LAM) 715-801021-838 Liner 2300 upper chamber coated
orcom2011 Used - $700.00 1 Jul/18/15 Feb/01/16
Description: Applied Materials AMAT 0020-33806 Upper Chamber REV P2 HLZ 319 005 0060-35209
katiil3 Used - $1,100.00 1 Nov/13/15 Jan/31/16
Description: Applied Materials AMAT 0020-33806 Upper Chamber
yht28111055 Used - $4,000.00 0 Nov/24/15 Dec/04/15
Description: AMAT, 0021-01421 UPPER CHAMBER, M-DPS / 0020-33806 Poly-DPS
katiil3 Used - $1,100.00 1 Feb/02/16 Feb/23/16
Description: Applied Materials AMAT 0020-33806 Upper Chamber
gesemiconductor Used - $1,700.00 0 Aug/17/16 Jan/04/18
Description: APPLIED MATERIALS 0021-00540 DPS Upper Chamber Lid DPS+ Poly Kit
yericomfg Used - $1,700.00 0 Aug/22/16 Aug/08/18
Description: Applied Materials; 0021-00540, DPS Upper Chamber Lid
gesemiconductor Used - $10,500.00 0 Aug/31/16 Aug/16/17
Description: APPLIED MATERIALS 0020-33806 DPS+ Poly Upper Chamber Body Assembly
bornalliancecom Used - $895.00 0 Sep/12/16 Feb/16/21
Description: Applied Materials 0010-36413 ASSY,TOOL, LIFTING, UPPER CHAMBER AMAT DPS
pohyh Used - $1,220.99 1 Nov/20/16 Oct/18/20
Description: 5883 LAM RESEARCH 17" UPPER CHAMBER WELDMENT 839-000888-005
skus092 NEW - $18,000.00 0 Nov/29/16 Dec/29/16
Description: Applied Materials 0021-09601 DPS METAL UPPER CHAMBER FULL A COATING
katiil3 Scrap, for parts - $1,499.00 1 Mar/08/17 Mar/08/17
Description: AMAT DPS Metal Upper Chamber 0040-02544
katiil3 Scrap, for parts - $1,500.00 1 Mar/15/17 Apr/09/18
Description: AMAT DPS Metal Upper Chamber 0040-02544
qrecycle NEW - $2,999.00 0 Jul/17/17 Jul/20/17
Description: applied material DPN upper chamber new 0040-61531
asset_asset Refurbished - $10,000.00 0 Jul/25/17 Dec/28/17
Description: Applied Materials 0020-33806 UPPER CHAMBER, POLY
asset_asset Refurbished - $17,000.00 0 Jul/25/17 Oct/26/17
Description: Applied Materials 0040-02544 / 0021-01421 UPPER CHAMBER
allforsale555 Used - $449.00 0 Oct/25/17 Jul/29/21
Description: LAM Liner 2300 upper chamber coated 715-801021-838
j316gallery Used - $16,000.00 0 Oct/31/17 Dec/05/17
Description: 9795 APPLIED MATERIAL YTTRIA COATED UPPER CHAMBER 0040-02544
usedeqsales Used - $1,700.00 0 Dec/20/17 Feb/20/18
Description: APPLIED MATERIALS 0021-00540 DPS + Poly UPPER CHAMBER LID
j316gallery Used - $2,500.00 2 Apr/17/18 Nov/27/23
Description: 10607 LAM RESEARCH LINER 2300 UPPER CHAMBER COATED 715-801021-848
usedeqsales Used - $6,004.18 1 Apr/30/18 May/03/18
Description: AMAT Applied Materials 0020-33806 Upper Chamber Assembly DPS + Poly Used Working
grandbirdnet Used - $10,000.00 0 Jun/18/18 Jun/30/22
Description: AMAT 0020-33806 UPPER CHAMBER DPS + POLY, USED
powersell007 Used - $399.00 2 Jun/22/18 Jan/11/20
Description: APPLIED MATERIALS 0200-35162 300MM EPI UPPER CHAMBER LINER AMAT
powersell007 Used - $499.00 0 Jul/23/18 Jun/30/22
Description: APPLIED MATERIALS 0200-35162 EPI UPPER CHAMBER LINER 200MM AMAT *CLEANED*
novusferro Used - $4,999.00 1 Jul/26/18 Aug/07/18
Description: Applied Material 0040-02544 Upper Chamber
smi-sales Used - $1,400.00 0 Aug/02/18 Apr/08/19
Description: AMAT P/N 0021-00540 DPS Upper Chamber Lid
yericomfg Used - $1,700.00 0 Aug/08/18 Aug/27/19
Description: Applied Materials; 0021-00540, DPS Upper Chamber Lid
novusferro NEW - $149.00 4 Aug/28/18 Dec/29/20
Description: Lam Research 715-801021-012 (Rev G) Upper Chamber Liner 300mm
intek22 NEW - $4,500.00 1 Aug/31/18 Jun/28/19
Description: New Sealed LAM Research 715-801021-838 300mm Upper Chamber Liner 2300
prism_electronics5 NEW - $136.00 3 Sep/18/18 Mar/24/20
Description: APPLIED MATERIALS AMAT 0020-18536 RING UPPER TEFLON UPPER CHAMBER
prism_electronics5 Used - $136.00 1 Sep/25/18 Aug/29/19
Description: APPLIED MATERIALS AMAT 0020-18536 RING TEFLON UPPER CHAMBER.
prism_electronics7 Used - $20,000.00 1 Sep/26/18 Jan/03/19
Description: APPLIED MATERIALS 0010-18253 UPPER CHAMBER ASSEMBLY
prism_electronics5 Used - $42.50 0 Oct/15/18 Aug/03/22
Description: APPLIED MATERIALS AMAT 0090-36179 CABLE ASSY UPPER CHAMBER
lonestar_tech NEW - $21,000.00 0 Nov/10/18 Nov/30/22
Description: Lam Research P/N: 853-330169-666 / ASSY, SPLIT UPPER CHAMBER SHAPED 9600 / NEW
earthfriendlyrecyclingwa NEW - $60.00 4 Dec/14/18 Dec/04/19
Description: Applied Materials Kit, 0240-37196 (DPS, Metal, Upper Chamber Oring, Viton, Sup)
semits-632 Used - $7,500.00 0 Jan/03/19 Mar/12/19
Description: 0040-02544 DPS Metal upper chamber
semits-632 Used - $7,500.00 1 Jan/03/19 Apr/12/19
Description: 0021-01421 DPS Metal upper chamber
semits-632 Used - $7,500.00 0 Jan/03/19 Mar/18/20
Description: 0020-33806 DPS Upper chamber
getspares.com_sparesllc09 Used - $7,500.26 0 Jan/22/19 May/26/22
Description: 0021-55308 / CENTURA CENTRIS DPS2 UPPER CHAMBER LINER / APPLIED MATERIALS AMAT
focusonline Refurbished - $10,000.00 0 Mar/21/19 Oct/31/19
Description: Refurbished & Unused: 0021-01421 / 0040-02544 DPS Upper Chamber Body, Metal Etch
focusonline NEW - $10,000.00 0 Apr/10/19 Oct/31/19
Description: New & Unused: A-Coat 0040-02544 / 0040-52662 DPS Upper Chamber Body, Metal Etch
getspares.com_sparesllc09 Used - $1,000.00 0 Jul/05/19 Sep/16/21
Description: 0040-82904 / ENDURA II TXZ 300MM UPPER CHAMBER RING / AMAT
prism_electronics5 Used - $136.00 0 Sep/05/19 Sep/05/19
Description: APPLIED MATERIALS AMAT 0020-18536 RING TEFLON UPPER CHAMBER.
powersell007 Used - $14,999.00 1 Oct/03/19 May/24/22
Description: APPLIED MATERIALS 0020-33806 UPPER CHAMBER ASSY DPS AMAT *UNUSED, SEALED*
gesemiconductor Used - $19,500.00 0 Nov/07/19 Feb/09/24
Description: Applied Materials 0021-09601 DPS Metal Upper Chamber Body Assembly
spsglobal NEW - $100.00 1 Feb/18/20 Mar/24/20
Description: 128-0903// AMAT APPLIED 0020-18536 RING,TEFLON,UPPER CHAMBER NEW
cubit001 NEW - $350.00 1 Apr/23/20 Jul/07/20
Description: 0020-18536 Teflon Ring Upper Chamber
semiconusa Used - $9,199.00 0 May/26/20 May/29/20
Description: AMAT 0040-02544 Upper Chamber DPS Metal DPS Plus
getspares.com_sparesllc09 Used - $1,560.59 0 Nov/12/20 May/26/22
Description: 0050-51984 / WELDMENT, PROCESS UPPER CHAMBER (2.65) / APPLIED MATERIALS AMAT
powersell007 Used - $9,799.00 1 Jun/02/21 Feb/19/22
Description: APPLIED MATERIALS 0040-02544 UPPER CHAMBER ASSY DPS METAL AMAT
farmoninc Used - $7,500.00 1 Jun/23/21 Jan/03/22
Description: AMAT 0040-81156 Liner, Upper, Chamber, DPS, Tetra, 395137
powersell007 Used - $9,799.00 1 Feb/19/22 Oct/30/24
Description: APPLIED MATERIALS 0040-02544 UPPER CHAMBER ASSY DPS METAL AMAT
excessdealer NEW - $199.00 1 Feb/22/22 Nov/30/22
Description: 810-345203-002 Rev C UPPER CHAMBER ADIO / LAM RESEARCH CORPORATION
powersell007 Used - $9,799.00 0 Feb/23/22 Mar/03/22
Description: APPLIED MATERIALS 0020-33806 UPPER CHAMBER ASSY, DPS AMAT
gesemiconductor Used - $10,500.00 0 Aug/01/22 Feb/09/24
Description: Applied Materials 0021-01421 DPS Metal Upper Chamber Body Assembly
sgcequipment NEW - $430.00 1 Aug/03/22 Jan/12/23
Description: Applied Materials/AMAT 0020-18536 UPPER CHAMBER TEFLON RING
farmoninc Used - $2,000.00 0 Aug/03/22 May/04/23
Description: Novellus 15-131711-01 Shield, Upper, Chamber, PC300, 108622
calchiptech Used - $13,000.00 0 Oct/26/22 Apr/21/23
Description: APPLIED MATERIALS 0020-33806 DPS POLY UPPER CHAMBER ASSY AMAT
jtechsemi Used - $8,000.00 0 Nov/01/22 Apr/03/23
Description: Applied Materials 0021-09601, 0021-01421 DPS METAL UPPER CHAMBER AMAT
jtechsemi Used - $9,000.00 0 Nov/01/22 Apr/03/23
Description: Applied Materials 0021-33806 DPS POLY UPPER CHAMBER AMAT
grandbirdnet Used - $700.00 0 Jan/12/23 Mar/02/23
Description: LAM RESEARCH 810-345203-002 UPPER CHAMBER ADIO PCB, USED
getspares.com_sparesllc09 Used - $10,875.60 0 May/23/23 Jul/12/23
Description: 0040-81156 / REV 001 AMAT UPPER CHAMBER LINER DPS / APPLIED MATERIALS
j316gallery Used - $1,500.00 0 Jun/13/23 Nov/27/23
Description: 33057 LAM RESEARCH LINER 2300 UPPER CHAMBER COATED (PARTS) 715-801021-848