Product description
Helium supply / IHC controller assembly using MKS pressure controllers, referenced with MKS 649A pressure controller context.
Specifications and identifiers
assembly identity
| Function | Helium supply controller box / pressure controller assembly |
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| Referenced controller | MKS 649A pressure controller |
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| Quantity context | Assembly with 3 MKS pressure controllers Verify actual installed controller count and configuration. |
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gas context
| Gas/service context | Helium supply Likely used for process or backside helium control; verify exact application. |
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Applications
Backside helium controlGas delivery systemsVacuum and process-pressure monitoringHelium pressure controlBackside helium or process gas supply control
How it works
A pressure controller, manometer, or gauge measures and/or controls pressure in gas or vacuum systems.
Range, gas compatibility, fittings, calibration, and control interface must match the tool configuration.
Technical guide
capacitance_manometer
A pressure sensor type commonly used for accurate gas/vacuum pressure measurement.
- MKS 649A
- MKS pressure controller family referenced by the provided evidence.
- Torr
- Pressure unit commonly used in vacuum/process equipment.
What to verify before purchase
- Verify MKS controller model suffix, pressure range, fittings, and calibration status.
- Confirm whether the assembly is complete and matches the tool BOM.
Confirm with the seller
- Exact IHC meaning and tool-module location are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.