Product description
Outsourced heater assembly, 6 in / 150 mm, DXZ, P5200 / Precision 5200 context
Specifications and identifiers
identification
| Item type | Heater assembly |
|---|
| Size context | 6 in / 150 mm |
|---|
| Process/module context | DXZ |
|---|
| Associated platform context | Centura / P5200 / Precision 5200 Platform context appears in supported descriptions and needs exact verification. |
|---|
Equipment context
- Applied Materials P5200 / Precision 5200 DXZ module
Applications
process chambersdegas modulesP5000/P5200-style platformsprocess-module heating150 mm chamber heater replacementDXZ heater service
How it works
A heater assembly used to bring a wafer, chamber, or related process component to controlled temperature.
Wafer size, material, resistance, temperature rating, and tool configuration must match the process module.
What to verify before purchase
- Verify resistance/ohm value and connector style.
- Confirm chamber platform and heater revision before installation.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.