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APPLIED MATERIALS 0010-06801

Entegris HPR3 DI Water Flowmeter

Market Availability & Pricing

Part number0010-06801
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales129 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Fluid & Gas › Flow Control › Flowmeters
Entegris HPR3 DI Water Flowmeter
APPLIED MATERIALS0010-06801DI water flowmeter
Product description
Entegris HPR3 flowmeter for DI water, Mirra CMP context.
Specifications and identifiers
identification
Vendor/contextEntegris HPR3
Flowmeter vendor/model family stated in the item description.
MediaDI water
Deionized water service is stated.
Tool contextMirra CMP
Tool context stated in the description.
Applications
process monitoringutility monitoringwafer handling feedbackDI water flow monitoringMirra CMP utility/cooling/flush water circuit
How it works

A sensor or measurement assembly detects a tool condition such as flow, position, conductivity, or motion feedback.

Sensor range, media compatibility, connector style, calibration, and response type affect process control and safety interlocks.

Technical guide
Convectron
A thermal-conductivity vacuum gauge family name commonly associated with Granville-Phillips style vacuum sensing.
DI water
Deionized water, commonly used for cooling, cleaning, or CMP utility circuits.
ZIF
Zero insertion force connector, used for delicate board or cable connections.
What to verify before purchase
  • Verify flow range, fittings, electrical connector, and calibration.
  • Confirm chemical/media compatibility and whether the flowmeter is clean for DI water service.
Confirm with the seller
  • Exact flow range and Mirra subsystem location.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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