Product description
Susceptor assembly, T1, 6 inch, 6 mm, BSE, CBS-4, MCVD.
Specifications and identifiers
dimensions and configuration
| Size | 6 inch Nominal wafer/susceptor class. |
|---|
| Thickness/feature | 6 mm Dimension called out in evidence. |
|---|
| Configuration | T1, BSE, CBS-4, MCVD Process/tool-specific configuration descriptors to verify. |
|---|
Applications
CVD processingwafer supportheated chamber hardwareWafer support in CVD processesHeated chamber assembly serviceSusceptor replacement
How it works
A susceptor is a wafer-support or process-support component used in thermal or deposition chambers.
Susceptor geometry and material strongly affect wafer placement, heating, and process uniformity.
Technical guide
MCVD
CVD-related process/platform descriptor; exact expansion should be verified for the installed tool.
- AMAT
- Common abbreviation for Applied Materials.
- ASSY
- Assembly.
- BSE
- Tool/process descriptor in evidence; verify exact meaning in the BOM.
- PCB
- Printed circuit board.
- PWB
- Printed wiring board; often used interchangeably with PCB.
- REV
- Revision level; confirm against the required tool configuration.
What to verify before purchase
- Confirm T1/BSE/CBS-4/MCVD configuration.
- Verify material, surface condition, and cleaning certification.
Confirm with the seller
- Exact material is not confirmed from the provided evidence.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.