APPLIED MATERIALS AMAT SHELL ASSY 15MM SIMPLE CATHODE ESC 0010-10982Applied Materials AMAT 0020-34862 Pedestal & 0010-10982 Shell Assy0010-10982 REV001 , 150MM, FLAT, Voxtec REFURBISHEDApplied Materials Amat Coque Assy 15MM Simple Cathode Esc 0010-10982Applied Materials 0010-10982 Shell Assy (0020-34862) 150mm, Simple Cathode ESCApplied Materials (AMAT) 0010-10982   ELECTROSTATIC CHUCK, 150mmApplied Materials 0010-10982 Shell Assy (0020-34862) 150mm, Simple Cathode ESCApplied Materials 0010-10982 Shell Assy (0020-34862) 150mm, Simple Cathode ESCApplied Materials 0010-10982 Shell Assy (0020-34862) 150mm, Simple Cathode ESCApplied Materials 0010-10982 Shell Assy (0020-34862) 150mm, Simple Cathode ESCApplied Materials 0010-10982 Shell Assy (0020-34862) 150mm, Simple Cathode ESCApplied Materials 0010-10982 Shell Assy (0020-34862) 150mm, Simple Cathode ESCApplied Materials 0010-10982 Shell Assy (0020-34862) 150mm, Simple Cathode ESCApplied Materials 0010-10982 Shell Assy (0020-34862) 150mm, Simple Cathode ESCApplied Materials 0010-10982 Shell Assy (0020-34862) 150mm, Simple Cathode ESCApplied Materials 0010-10982 Shell Assy (0020-34862) 150mm, Simple Cathode ESCApplied Materials 0010-10982 Shell Assy (0020-34862) 150mm, Simple Cathode ESCApplied Materials 0010-10982 Shell Assy (0020-34862) 150mm, Simple Cathode ESCApplied Materials 0010-10982 Shell Assy, 150mm, Simple Cathode ESCAMAT 0010-10982 SHELL ASSY, 150MM, FLAT(1S), 6". Applied materialsAMAT APPLIED MATERIALS 0010-10982 SHELL ASY,150MM,FLAT(1S),5.679DIA,5MIC USED
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APPLIED MATERIALS 0010-10982

150 mm ESC Shell Assembly

Market Availability & Pricing

SHELL ASSY, 150MM, FLAT(1S), 6"

Part number0010-10982
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales1011.88 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › ESC & Cathode Components
150 mm ESC Shell Assembly
APPLIED MATERIALS0010-10982ESC shell assembly
Product description
Shell assembly, 150 mm flat simple cathode ESC
Specifications and identifiers
ESC-related details
ComponentShell assembly
Provided evidence repeatedly identifies a shell assembly.
Wafer size150 mm
150 mm appears in multiple descriptions.
ConfigurationFlat simple cathode ESC
Configuration terms appear in provided evidence.
Related part0020-34862 pedestal reference noted
Related pedestal reference appears in some evidence and should be verified.
Related parts
Applications
wafer clampingcathode or pedestal assembliesetch and CVD chambers150 mm ESC/cathode assembly servicingplasma process chamber wafer supportpedestal or shell replacement
How it works

An electrostatic chuck-related component used to hold or support wafers by electrostatic force and/or provide thermal control.

ESC-related parts are highly configuration-sensitive and can affect wafer clamping, heat transfer, process uniformity, and tool safety.

Technical guide
Cathode

The powered or bias-related electrode area in many plasma tools.

ESC

Electrostatic chuck

What to verify before purchase
  • Confirm shell diameter and flat/simple-cathode configuration.
  • Verify associated pedestal part number and revision.
  • Inspect surface condition, coating, and refurbishment status.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

APPLIED MATERIALS AMAT SHELL ASSY 15MM SIMPLE CATHODE ESC 0010-10982

APPLIED MATERIALS AMAT SHELL ASSY 15MM SIMPLE CATHODE ESC 0010-10982

USD 1000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jan 14, 2022 15:30 UTC
End recorded: Dec 7, 2024 00:49 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 29, 2026 16:20 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Applied Materials AMAT 0020-34862 Pedestal & 0010-10982 Shell Assy

Applied Materials AMAT 0020-34862 Pedestal & 0010-10982 Shell Assy

USD 149.00

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Oct 27, 2020 02:37 UTC
End recorded: Dec 7, 2024 14:51 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 21, 2026 11:29 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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