Product description
Hybrid RF matching module for etch RF match use, associated with MXP / 13.56 MHz descriptions.
Specifications and identifiers
identified features
| Function | hybrid RF match |
|---|
| Application | etch RF matching |
|---|
| Frequency noted | 13.56 MHz appears in evidence |
|---|
Applications
plasma etchPVD and CVD RF deliveryimpedance matching networksRF impedance matching for plasma etchHybrid match module replacement
How it works
An RF matching network or RF power component is used in plasma systems to deliver or condition RF energy.
RF parts are highly configuration-specific; frequency, power rating, impedance, and connector configuration must match the chamber design.
What to verify before purchase
- Verify frequency, power rating, connector style, and tuning/motor configuration.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.