AMAT Applied Materials 0010-13320 P5000 Cleanroom 4,5,6" Robot Body Spare0010-13320 / ASSY, ROBOT DRIVE, 4 , 5 , 6 / APPLIED MATERIALS AMATAMAT Applied Materials 0010-13320 P5000 Cleanroom 4,5,6" Robot Body SurplusAMAT Applied Materials 0010-13320 P5000 200mm Robot Body 8" w/Single Gear Spare0010-13320 / P5000 ROBOT / AMATAMAT 0010-13320 ROBOT DRIVE ASSY (LOT OF 2)AMAT Applied Materials 0010-13320 ASSY , ROBOT DRIVE , 4", 5", 6"Applied Materials AMAT 0010-13320 P5000 ROBOT DRIVE 4 5 6 Parts unitApplied Materials AMAT 0010-13320 P5000 ROBOT DRIVE 4 5 6 missing a servo motorAMAT 0010-13320  P5000 ROBOT DRIVE, 4", 5", 6" missing a servo motorAMAT 0010-13320  P5000 ROBOT DRIVE, 4", 5", 6" Parts unitAMAT 0010-13320  P5000 ROBOT DRIVE, 4", 5", 6"
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APPLIED MATERIALS 0010-13320

P5000 Robot Drive Assembly

Market Availability & Pricing

Part number0010-13320
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales2009.21 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Wafer Handling › Robot Assemblies
P5000 Robot Drive Assembly
APPLIED MATERIALS0010-13320Robot drive assembly
Product description
Applied Materials 0010-13320 robot drive assembly for P5000 4, 5, and 6 inch wafer handling context.
Specifications and identifiers
identification
DescriptionRobot drive assembly
Reported platformP5000
Wafer size context4 inch, 5 inch, and 6 inch wording appears
Applications
P5000 wafer handlingcleanroom robot modulestransfer drive assembliesP5000 robot drive serviceWafer transfer motion assemblyRobot body spare
How it works

A robot drive or robot body assembly used to move wafers between tool stations.

Robot drive condition affects positioning accuracy, transfer reliability, and wafer breakage risk.

What to verify before purchase
  • Verify whether servo motor and gears are included
  • Check backlash, bearings, belts/gears, and encoder condition
  • Confirm wafer size configuration and tool revision
Confirm with the seller
  • Some units are described as parts/missing a servo motor; completeness is not confirmed

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

AMAT Applied Materials 0010-13320 P5000 Cleanroom 4,5,6" Robot Body Spare

AMAT Applied Materials 0010-13320 P5000 Cleanroom 4,5,6" Robot Body Spare

USD 1109.2100

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 18, 2025 18:46 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 11, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

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0010-13320 / ASSY, ROBOT DRIVE, 4 , 5 , 6 / APPLIED MATERIALS AMAT

0010-13320 / ASSY, ROBOT DRIVE, 4 , 5 , 6 / APPLIED MATERIALS AMAT

USD 2406.8900

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Aug 2, 2024 20:00 UTC
End recorded: Dec 6, 2024 21:05 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:22 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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