Product description
Applied Materials 0010-13623 Vectra IMP RF match assembly, described with .015 µF capacitor revision context for PVD/IMP source use.
Specifications and identifiers
identification
| Function | Vectra IMP RF match assembly |
|---|
| Capacitor notation | 0.015 µF capacitor revision context |
|---|
| Process context | PVD / IMP source |
|---|
Applications
plasma power deliveryRF matching networkslamp or heater drive circuitsimplant beamline power suppliesIMP source RF matchingPVD RF matching network servicePlasma power impedance matching
How it works
A power supply, generator, driver, or matching network used to deliver controlled electrical energy to a process subsystem.
Power rating, frequency, interface, cooling, and configuration must match the original installation to avoid process instability or equipment damage.
Technical guide
DC plasma generation
controlled DC power delivery for plasma or sputtering systems
RF matching
impedance matching between generator and plasma load
- MHz
- megahertz frequency rating
- kW
- kilowatt power rating
What to verify before purchase
- Verify RF frequency and power rating
- Inspect capacitor and matching components
- Confirm revision and connector/feedthrough layout
Confirm with the seller
- Exact tool/chamber compatibility is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.