Product description
Pedestal lift assembly, Preclean / Endura
Specifications and identifiers
identification
| Function | Pedestal lift assembly |
|---|
| Tool/process context | Preclean and Endura referenced |
|---|
mechanical context
| Role | Moves or supports pedestal/lift hardware in a process module. |
|---|
Applications
Wafer handlingLift mechanismsRobot/indexer assembliesShutter or pedestal motionPreclean chamber pedestal serviceEndura lift assembly replacement
How it works
A motion-control component or assembly used to move wafers, shutters, pedestals, or mechanical mechanisms.
Motor type, travel geometry, mounting pattern, sensor feedback, and tool position are important for compatibility and alignment.
Technical guide
- ASSY
- Assembly.
- Stepper
- A motor type that moves in controlled increments.
What to verify before purchase
- Chamber variant and lift travel
- Associated part numbers
- Condition of bearings, motor, and lift hardware
Confirm with the seller
- Specific tool serial-number compatibility
- Current calibration or functional test status
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.