Product description
300 mm Endura PVD source chamber top / source chamber component, with references to 402902-1 and 403695SRC1 source/chamber-top identifiers.
Specifications and identifiers
Function
| Likely role | Upper source/chamber mechanical section for a PVD process module |
|---|
Identity
| Supported item noun | 300 mm PVD source chamber top |
|---|
| Platform/context | Endura PVD |
|---|
| Cross references | 402902-1; 403695SRC1 |
|---|
Equipment context
- Applied Materials Endura PVD
Applications
PVD/CVD/etch process chamberschamber rebuildsconsumable kitstool refurbishmentPVD source chamber service300 mm source assembly repairchamber top replacement
How it works
A mechanical chamber or process-area component used near the wafer, plasma, gas flow, or vacuum boundary of a semiconductor tool.
Geometry, coating, material, and revision can affect process uniformity, particle control, sealing, and compatibility with nearby assemblies.
What to verify before purchase
- Confirm chamber-top revision and mating source assembly
- Check whether CPI-VMO/STP hardware is included or only referenced
Confirm with the seller
- Complete chamber assembly inclusion
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.