Product description
8 inch degas lamp module / assembly, 350 C, used in PVD degas context
Specifications and identifiers
Thermal module attributes
| Function | Degas lamp module Lamp/heater assembly associated with wafer degas heating. |
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| Nominal size | 8 inch Wafer/tool size context from provided descriptions. |
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| Temperature clue | 350 C Temperature rating/context should be verified against tool documentation. |
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| Process context | PVD / Endura context appears in supporting descriptions Useful fitment clue, not universal compatibility. |
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Applications
PVD pre-clean/degas modulesEndura-style wafer processingThermal conditioning before depositionDegas heater/lamp replacementPVD chamber maintenanceThermal module refurbishment
How it works
A degas lamp module heats wafers or chamber areas to drive off moisture and volatile contaminants before processing.
Lamp condition and temperature capability affect process stability, wafer cleanliness, and thermal uniformity.
Technical guide
degas
Heating step used to remove adsorbed gases or moisture.
What to verify before purchase
- Verify lamp/module revision, connector, mounting, and 350 C rating.
- Confirm 8 inch PVD/Endura fitment against tool BOM.
- Inspect lamps, reflectors, wiring, and ceramic/insulator condition.
Confirm with the seller
- Exact lamp wattage and electrical rating are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.