AMAT 0010-22985 _ SUPER LOW TEMP FDR BIASABLE ESCApplied Materials 0010-22985 300MM MCA ASSY AMAT32542 APPLIED MATERIALS PEDESTAL, PIB, 300MM FDR SLTESC DYLYN AS 0010-22985AMAT 0010-22985 ELECTROSTATIC CHUCK ESC APPLIED MATERIALSApplied Materials 0010-22985 300MM ASSY AMATC0606 APPLIED MATERIALS PEDESTAL PIB 300MM FDR SLTESC DYLYN AS 0010-22985AMAT Applied Materials 0010-22985 300MM MCA ASSY AMATApplied Materials AMAT 0010-22985 LTE MCA ESC 300mm Heater Assy - Refurbished.Applied Materials 0010-22985 300MM MCA ASSY AMATApplied Materials 0010-22985 300MM MCA HEATER ASSY AMATAPPLIED MATERIALS 0010-22985 -11 , 0040-33562-008 APPLIED MATERIALS 0010-22985 PEDESTAL, PIB, 300MM FDR SLTESC DYLYN AS AMATApplied Materials 0010-22985APPLIED MATERIALS 0010-22985 PEDESTAL PIB 300MM FDR SLTESC DYLYN AS AMAT 2015APPLIED MATERIALS 0010-22985 PEDESTAL PIB 300MM FDR SLTESC DYLYN AS AMAT 2015APPLIED MATERIALS 0010-22985 PEDESTAL PIB 300MM FDR SLTESC DYLYN AS AMAT 2015APPLIED MATERIALS 0010-22985 PEDESTAL PIB 300MM FDR SLTESC DYLYN AS AMAT 2015APPLIED MATERIALS 0010-22985 PEDESTAL PIB 300MM FDR SLTESC DYLYN AS AMAT 2015APPLIED MATERIALS 0010-22985 PEDESTAL PIB 300MM FDR SLTESC DYLYN AS AMAT 2015APPLIED MATERIALS 0010-22985 PEDESTAL PIB 300MM FDR SLTESC DYLYN AS AMAT 2015
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APPLIED MATERIALS 0010-22985

300 mm Biasable Electrostatic Chuck / Pedestal Heater Assembly

Market Availability & Pricing

Part number0010-22985
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales25000 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chucks & Pedestals › Electrostatic Chucks
300 mm Biasable Electrostatic Chuck / Pedestal Heater Assembly
APPLIED MATERIALS0010-22985electrostatic chuck pedestal assembly
Product description
300 mm super-low-temperature biasable ESC pedestal/heater assembly.
Specifications and identifiers
identification
Normalized item300 mm biasable ESC pedestal/heater assembly
A wafer support assembly combining electrostatic chuck or pedestal functionality with heater-related hardware.
Key termsSuper low temperature; FDR; biasable ESC; pedestal PIB; MCA heater assembly
These terms appear around the same part and should be matched to the exact installed configuration.
Wafer size context300 mm
Indicates 300 mm process hardware context.
technical context
ESC roleElectrostatic wafer clamping
An ESC holds the wafer in place using electrostatic force during processing.
Pedestal/heater roleThermal and mechanical wafer support
Pedestal heater assemblies provide wafer support and thermal control.
Applications
300 mm plasma process chamberslow-temperature wafer processingbiasable wafer supportheater/pedestal replacement300 mm wafer support pedestalBiasable ESC replacementLow-temperature chamber heater/pedestal assembly
How it works

A wafer pedestal assembly that may clamp a wafer electrostatically and provide thermal control during processing.

ESC and pedestal assemblies are high-value, fit-critical parts because wafer temperature, bias, flatness, and clamping performance affect process results.

Technical guide
biasable_pedestal

Allows RF or electrical bias to be applied at the wafer support.

electrostatic_chuck

Uses electrostatic force to hold a wafer during processing.

ESC
Electrostatic chuck.
FDR
Equipment-specific abbreviation; verify from tool documentation.
SLTESC
Likely shorthand for super-low-temperature electrostatic chuck; verify exact OEM meaning.
What to verify before purchase
  • Verify suffix/revision, ceramic condition, backside gas ports, embedded heater resistance, and electrical isolation.
  • Confirm whether the required item is the full ESC/pedestal assembly or a heater/MCA subassembly.
  • Check for refurbish history, flatness, leakage, and particle/contamination controls.
Confirm with the seller
  • Exact suffix compatibility
  • Electrical ratings
  • Backside gas and cooling configuration
  • Tool/chamber model

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

AMAT 0010-22985 _ SUPER LOW TEMP FDR BIASABLE ESC

AMAT 0010-22985 _ SUPER LOW TEMP FDR BIASABLE ESC

USD 68000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Mar 25, 2024 15:00 UTC
End recorded: Dec 7, 2024 02:49 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 6, 2026 16:01 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Applied Materials 0010-22985 300MM MCA ASSY AMAT

Applied Materials 0010-22985 300MM MCA ASSY AMAT

USD 25000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Apr 12, 2023 14:00 UTC
End recorded: Dec 7, 2024 09:15 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:22 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
32542 APPLIED MATERIALS PEDESTAL, PIB, 300MM FDR SLTESC DYLYN AS 0010-22985

32542 APPLIED MATERIALS PEDESTAL, PIB, 300MM FDR SLTESC DYLYN AS 0010-22985

USD 7840.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Apr 5, 2023 07:30 UTC
End recorded: Dec 7, 2024 07:42 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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