Product description
PVD chamber source 1, CPI-VMO, with Endura 300mm context; revisions 001/003/004 are mentioned.
Specifications and identifiers
configuration
| Chamber/source position | Source 1 Position identifier for this PVD chamber source assembly. |
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| Configuration | CPI-VMO Process/source configuration descriptor to verify. |
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| Platform context | Endura 300mm Platform context indicated in evidence. |
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| Revisions mentioned | 001, 003, 004 Revision must be matched to the required chamber build. |
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Applications
PVD source modulesEndura chamber hardware300mm sputtering systemsPVD chamber source replacementEndura source-module serviceSputtering chamber maintenance
How it works
A PVD source/chamber assembly related to the sputtering source area of a deposition chamber.
Source assemblies determine physical fit, material compatibility, and process performance in PVD chambers.
Technical guide
PVD
Physical vapor deposition, commonly sputtering-based thin-film deposition.
- AMAT
- Common abbreviation for Applied Materials.
- ASSY
- Assembly.
- CPI-VMO
- Configuration descriptor in the provided evidence; verify exact chamber meaning.
- PCB
- Printed circuit board.
- PWB
- Printed wiring board; often used interchangeably with PCB.
- REV
- Revision level; confirm against the required tool configuration.
What to verify before purchase
- Confirm source position and revision.
- Verify chamber model, target/source type, and any copper/Cu-specific configuration.
Confirm with the seller
- Exact source material and chamber option set are not fully confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.