Product description
Applied Materials 0010-26180 high-efficiency bias RF match assembly with filter PCB for 300 mm context.
Specifications and identifiers
identification
| Function | High-efficiency bias RF match with filter PCB |
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| Nominal context | 300 mm |
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| Description | HE RF match, bias with filter PCB |
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Applications
plasma source powerbias RF matchingPVD/etch/CVD process modulesBias RF matching300 mm plasma chamber RF subsystemRF match/filter assembly service
How it works
An RF generator, match network, or RF power-path assembly used to deliver or tune power for plasma processing.
Frequency, power rating, impedance range, connector style, and control interface must match the tool.
Technical guide
13.56 MHz
common industrial RF frequency
RF matching
impedance matching to reduce reflected RF power
What to verify before purchase
- Verify frequency, power rating, and connector configuration
- Check tune mechanism and filter PCB condition
- Confirm chamber/source compatibility and revision
Confirm with the seller
- Exact frequency and compatible chamber are not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.