Product description
Applied Materials RF match assembly with peak detector, associated with P5000 / Precision 5000 Phase IV and 13.56 MHz, 3 kV references.
Specifications and identifiers
identified attributes
| Function | RF match assembly Matching network for RF power delivery. |
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| Feature | Peak detector Supported by provided descriptions. |
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| Frequency reference | 13.56 MHz Verify on the RF match label. |
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| Voltage reference | 3 kV Verify before use. |
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| Platform references | P5000 / Precision 5000 Phase IV Supported by provided evidence but confirm chamber/configuration. |
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Equipment context
- Applied Materials P5000 / Precision 5000
Applications
plasma etchPECVDPVD sputteringwafer-clean or preclean chambersRF match replacementplasma chamber RF tuningetch chamber maintenance
How it works
An RF power subsystem component used to generate, match, or deliver radio-frequency energy to a process chamber.
RF components are highly configuration-dependent; frequency, power rating, connector style, and matching-network compatibility must be verified.
Technical guide
RF_matching
An RF matching network transforms chamber/load impedance so RF power can transfer efficiently with reduced reflected power.
peak_detector
A peak detector monitors RF voltage/current peaks for control or protection.
- ESC
- Electrostatic chuck.
- P5000
- Applied Materials Precision 5000 family reference.
- RF
- Radio frequency.
What to verify before purchase
- Frequency and power/voltage rating
- Connector type and cooling requirements
- Revision and chamber side/position
- Peak detector interface
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.