Applied Materials 0010-30135 DPS METAL THROTTLE VALVE AMATAMAT 0010-30135, DPS, METAL, THROTTLE VALVE 5-PHASE, ASSYApplied Materials (AMAT) 0010-30135 DPS, METAL, THROTTLE VALVE 5 PHASE, ASSYHLZ-467-019 / THROTTLE VALVE ASSY 0010-30135 / APPLIED MATERIALS AMATAPPLIED MATERIALS 0010-30135 DPS METAL THROTTLE VALVE 5-PHASE ASSY, AMATAMAT 0010-30135 DPS METAL THROTTLE VALVE 5-PHASE ASSYAMAT, DPS Metal Throttle valve, 0010-30135Applied Materials DPS 5 Phase Throttle Valve Assy 0010-30135 Rev D AssemblyApplied Materials DPS 5 Phase Throttle Valve Assy 0010-30135 Rev DApplied Materials DPS 5 Phase Throttle Valve Assy 0010-30135 Rev DApplied Materials DPS 5 Phase Throttle Valve Assy 0010-30135 Rev D0010-30135 / APPLIED MATERIALS DPS, METAL, THROTTLE VALVE 5-PHASE, ASSYAMAT 0010-30135 THROTTLE VALVE DPS METAL0010-30135 / APPLIED MATERIALS DPS, METAL, THROTTLE VALVE 5-PHASE, ASSYAMAT 0010-30135 Throttle Valve Assy, DPS Metal Etch System AMAT 0010-30135 Throttle Valve Assy, DPS Metal Etch System AMAT 0010-30135 Throttle Valve Assy, DPS Metal Etch System AMAT 0010-30135 Throttle Valve Assy, DPS Metal Etch System AMAT 0010-30135 Throttle Valve Assy, DPS Metal Etch System AMAT 0010-30135 Throttle Valve Assy, DPS Metal Etch System AMAT 0010-30135 Throttle Valve Assy, DPS Metal Etch System AMAT 0010-30135 Throttle Valve Assy, DPS Metal Etch System AMAT 0010-30135 Throttle Valve Assy, DPS Metal Etch System AMAT 0010-30135 Throttle Valve Assy, DPS Metal Etch System AMAT 0010-30135 Throttle Valve Assy, DPS Metal Etch System AMAT 0010-30135 Throttle Valve Assy, DPS Metal Etch System AMAT 0010-30135 Throttle Valve Assy, DPS Metal Etch System AMAT 0010-30135 Throttle Valve Assy Lot of Eight, DPS Metal Etch System AMAT 0010-30135 Throttle Valve Assy Lot of Eight, DPS Metal Etch System AMAT 0010-30135 Throttle Valve Assy Lot of Eight, DPS Metal Etch System AMAT 0010-30135 Throttle Valve Assy Lot of Eight, DPS Metal Etch System AMAT 0010-30135 Throttle Valve Assy Lot of Eight, DPS Metal Etch System AMAT 0060-35186 Throttle Valve Assy Lot, DPS Metal Etch System 0010-30135AMAT 0060-35186 Throttle Valve Assy Lot, DPS Metal Etch System 0010-30135
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APPLIED MATERIALS 0010-30135

DPS Metal 5-phase throttle valve assembly

Market Availability & Pricing

Part number0010-30135
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales4999 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Vacuum › Valves & Flow Control › Throttle Valves
DPS Metal 5-phase throttle valve assembly
APPLIED MATERIALS0010-30135Throttle valve assembly
Product description
DPS Metal Etch 5-phase throttle valve assembly for Applied Materials 0010-30135
Specifications and identifiers
observed identity
Observed item nounThrottle valve assembly
Repeated titles identify a throttle valve assy.
Tool/process contextDPS Metal Etch
Multiple titles identify DPS Metal Etch.
Phase detail5-phase
Several titles say 5 phase/5-phase.
RevisionRev D mentioned
Some listings mention Rev D.
Equipment context
  • Applied Materials DPS Metal Etch
Applications
metal etch chamber pressure controlDPS etch exhaust pathEtch chamber pressure controlThrottle valve replacement
How it works

A throttle valve controls vacuum conductance for chamber pressure regulation.

Incorrect throttle valve type or motor/drive phase can make chamber pressure control impossible.

Technical guide
DPS

Decoupled plasma source terminology in Applied Materials etch tools.

5-phase
Likely refers to the stepper/motor drive phase type; verify on nameplate.
What to verify before purchase
  • Exact revision and sub-revision
  • Connector/keying and physical layout
  • OEM label/nameplate and matching part number
  • Condition, contamination, and refurbishment history
  • Compatibility with the specific tool configuration
Confirm with the seller
  • Motor/drive type
  • Valve body completeness
  • Seal condition

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Applied Materials 0010-30135 DPS METAL THROTTLE VALVE AMAT

Applied Materials 0010-30135 DPS METAL THROTTLE VALVE AMAT

USD 10000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: May 25, 2023 07:30 UTC
End recorded: Dec 6, 2024 18:30 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

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AMAT 0010-30135, DPS, METAL, THROTTLE VALVE 5-PHASE, ASSY

AMAT 0010-30135, DPS, METAL, THROTTLE VALVE 5-PHASE, ASSY

USD 8999.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Apr 24, 2023 02:01 UTC
End recorded: Dec 7, 2024 12:30 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:23 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

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Applied Materials (AMAT) 0010-30135 DPS, METAL, THROTTLE VALVE 5 PHASE, ASSY

Applied Materials (AMAT) 0010-30135 DPS, METAL, THROTTLE VALVE 5 PHASE, ASSY

USD 12995.9500

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 7, 2021 22:01 UTC
End recorded: Dec 7, 2024 02:57 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 29, 2026 16:12 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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