Product description
High-efficiency RF match module / RF auto-match assembly for Applied Materials MXP etch chamber use, with 13.56 MHz identified.
Specifications and identifiers
identification
| Function | High-efficiency RF match RF impedance matching assembly used between an RF generator and plasma chamber. |
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| Identified application | MXP etch Identified etch chamber context. |
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reported specs
| Frequency | 13.56 MHz identified Common plasma RF frequency; verify on the nameplate. |
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Applications
plasma etch chambersPVD/CVD plasma systemsRF generator-to-chamber matchingplasma etch RF matchingRF generator-to-chamber impedance matchingMXP etch chamber RF subsystem
How it works
An RF match network or RF match control component used to couple RF power efficiently into a plasma load.
Frequency, power rating, impedance range, connector layout, and chamber-specific tuning requirements are critical for plasma process stability.
Technical guide
rf_power
RF power systems often use generators, matching networks, and interlocks to stabilize energy delivery to a chamber.
- RF
- Radio frequency; in plasma tools this commonly refers to power used to generate or bias plasma.
What to verify before purchase
- Frequency and power rating
- Match-network revision
- Connector and cooling configuration
- Target chamber compatibility
Confirm with the seller
- Full tuning range
- Power rating
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.