Product description
RF filter box assembly for ceramic heater hardware, associated with AMAT 0010-34855 and 0090-04947 references
Specifications and identifiers
supported identity
| item noun | RF filter box assembly An RF filter enclosure/assembly for a heater circuit. |
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| application | Ceramic heater Evidence repeatedly links it to ceramic heater hardware. |
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| associated number | 0090-04947 Appears as a related part number; verify relationship before cross-use. |
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| revision | Rev. 02 appears Revision wording is present but not guaranteed for all units. |
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Applications
ESC bias powerRF generationDC power distributionplasma power systemsRF noise filtering for ceramic heater circuitsChamber heater support electronics
How it works
A power supply, RF generator, or power module converts and controls electrical energy for tool subsystems.
Voltage, power rating, connector configuration, and revision must match the tool application.
Technical guide
electronics
High-voltage/RF modules may contain capacitors and specialized power electronics.
ESC
Electrostatic chuck power; RF matching/generation may use impedance control.
- HV
- high voltage
- PSU
- power supply unit
- RF
- radio frequency
What to verify before purchase
- Verify revision and related subassembly number
- Confirm connector layout and grounding
- Confirm ceramic heater/chamber compatibility
Confirm with the seller
- Exact internal filter components
- Exact platform compatibility
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.