Product description
Ceramic chuck assembly, 200 mm / 8 inch, referenced with THK CBL assembly context for Applied Materials equipment.
Specifications and identifiers
condition handling
| Condition references | New/refurbished variants appear in evidence Actual inventory condition should be verified separately. |
|---|
configuration
| Assembly context | THK CBL assembly Provided evidence includes THK/CBL wording; verify exact meaning and included cable/components. |
|---|
physical
| Wafer size context | 200 mm / 8 inch |
|---|
| Material | Ceramic |
|---|
Applications
Etch systemsCMP or spin-processing modulesWafer handling and process chambersWafer support or handling chuckProcess or handling module replacement assembly
How it works
A chuck supports, holds, or rotates a wafer or substrate during processing or handling.
Chuck size, material, flatness, mounting, cable/heater connections, and tool family must match the process module.
Technical guide
THK
May refer to a vendor/component marking in the evidence; verify the exact meaning on the part.
ceramic
Ceramic chucks can provide thermal stability, electrical insulation, and process compatibility.
- 200 mm / 8 inch
- Wafer size context referenced by the provided evidence.
- spinner
- A rotating chuck used in spin or handling applications.
What to verify before purchase
- Confirm ceramic surface condition, size, cable/connector inclusion, and revision.
- Verify exact tool/module compatibility before installation.
Confirm with the seller
- Exact chamber/tool family is not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.