AMAT DPS 300mm MESA SOURCE 5/15 COILS W/RAISED MATCH 0010-52539AMAT Applied Materials DPS 300mm Mesa Source 5/15 Coils 0010-52539AMAT Applied Materials DPS 300mm Mesa Source 5/15 Coils 0010-52539Applied Materials/AMAT ASSY, MESA SOURCE 5/15 COILS W/RAISED MATCH 0010-52539Applied Materials/AMAT ASSY, MESA SOURCE 5/15 COILS W/RAISED MATCH 0010-52539Applied Materials/AMAT ASSY, MESA SOURCE 5/15 COILS W/RAISED MATCH 0010-52539Applied Materials/AMAT ASSY, MESA SOURCE 5/15 COILS W/RAISED MATCH 0010-52539Applied Materials/AMAT ASSY, MESA SOURCE 5/15 COILS W/RAISED MATCH 0010-52539Applied Materials/AMAT ASSY, MESA SOURCE 5/15 COILS W/RAISED MATCH 0010-52539Applied Materials/AMAT ASSY, MESA SOURCE 5/15 COILS W/RAISED MATCH 0010-52539Applied Materials/AMAT ASSY, MESA SOURCE 5/15 COILS W/RAISED MATCH 0010-52539Applied Materials 0010-52539 ASSY, MESA SOURCE 5/15 COILS W/RAISED MATCH
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APPLIED MATERIALS 0010-52539

300 mm Mesa Source Assembly with Raised Match

Market Availability & Pricing

Part number0010-52539
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Electrical › RF Power › RF Matching Networks
300 mm Mesa Source Assembly with Raised Match
APPLIED MATERIALS0010-52539Mesa source assembly
Product description
Applied Materials 0010-52539 DPS 300 mm Mesa source assembly with 5/15 coils and raised match.
Specifications and identifiers
identification
DescriptionMesa source 5/15 coils with raised match
Reported size/context300 mm DPS
Applications
etch and PVD plasma toolssource and bias RF circuitsLam TCP/DSQ and Applied Materials RF power systemsDPS source RF/match assembly300 mm plasma source serviceCoil and raised-match subsystem replacement
How it works

An RF matching network used between an RF generator and a plasma load.

Proper impedance matching reduces reflected power and helps maintain stable plasma operation.

Technical guide
RF matching

capacitor/inductor network for impedance transformation

RF
radio frequency power used for plasma generation
What to verify before purchase
  • Verify coil count/configuration and match assembly revision
  • Check source/match condition and cooling/interlock interfaces
  • Confirm chamber compatibility
Confirm with the seller
  • Exact DPS chamber variant is not confirmed

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

AMAT DPS 300mm MESA SOURCE 5/15 COILS W/RAISED MATCH 0010-52539

AMAT DPS 300mm MESA SOURCE 5/15 COILS W/RAISED MATCH 0010-52539

USD 41666.6700

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: NEW
Listed: Feb 28, 2018 01:47 UTC
End recorded: Dec 7, 2024 03:26 UTC
Estimated remaining at check: 3
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:06 UTC

Availability has not been rechecked; current availability is unknown.

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