Product description
150 mm / 6 inch susceptor assembly, TEOS BB/top mount wording.
Specifications and identifiers
supported description
| Part role | Susceptor assembly |
|---|
| Wafer size | 150 mm / 6 inch |
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| Process wording | TEOS BB |
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| Possible treatment | Anodized appears in one vendor reference |
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Applications
PVD/CVD heaterspedestalssusceptorsthermal moduleswafer support during TEOS/CVD processingthermal/process susceptor replacement
How it works
A thermal assembly or heated chamber component used to heat, support, or thermally condition wafers or process hardware.
Thermal parts affect process uniformity and must match temperature rating, wafer size, and chamber interface.
What to verify before purchase
- Verify material/coating, top-mount details, chamber type, and revision.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.