Product description
CVD/P5000 slit valve assembly with SMC pneumatic cylinder references, including NCDQ1B32-G0069/NCD01B32-G0069 variants in the item description.
Specifications and identifiers
identification
| Function | CVD chamber slit valve Controls wafer/chamber access through a slit opening. |
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| Referenced platform/context | P5000 / CVD / Etch Repeated context in the item description; verify exact chamber configuration. |
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| Referenced actuator | SMC NCDQ1B32-G0069 / NCD01B32-G0069 Pneumatic cylinder/model text is referenced in multiple descriptions; verify actual installed cylinder marking. |
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| Seal reference | Kalrez O-ring mentioned in one description Specific installed seal material should be verified on the part. |
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Applications
slit valve and loadlock accessgas panel isolationvacuum foreline and chamber controlslit-valve actuation for CVD or etch chamber accessP5000 chamber door/slit valve service
How it works
A valve assembly controls gas, vacuum, or chamber access by opening, closing, isolating, or throttling a flow path.
Valve type, actuator style, seal material, port size, and normal state must match the process and safety requirements of the tool.
Technical guide
- KF
- A quick-flange vacuum fitting family.
- NC
- Normally closed; the valve is closed when not actuated.
- Viton
- A fluoroelastomer seal material often used for vacuum or chemical service.
What to verify before purchase
- Verify the exact SMC cylinder model and revision on the valve.
- Confirm seal/O-ring material and condition.
- Confirm whether the assembly is for CVD, etch, or a specific P5000 chamber variant.
Confirm with the seller
- Exact chamber compatibility beyond the repeated P5000/CVD/etch context.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.