Product description
Applied Materials 0010-76535 pneumatic logic box assembly for tilt cassette / P5000 Ergo pneumatic box context.
Specifications and identifiers
identification
| Description | Assembly, pneumatic logic box, tilt cassette |
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| Alternate context | Ergo logic box / P5000 Ergo pneumatic box appears in evidence |
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| Function | Pneumatic logic/control box for cassette tilt or handling mechanism |
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Equipment context
- Applied Materials P5000 Ergo/cassette handling subsystem
Applications
robots and wafer orienterscassette and load-lock mechanismspad conditioner or wafer lift assembliesCassette tilt pneumatic controlP5000 Ergo pneumatic box serviceWafer-handling pneumatic logic replacement
How it works
A wafer-handling or motion component used to move, support, sense, clamp, or orient wafers and cassettes.
Geometry, motion range, encoder feedback, and interlock function must be correct to prevent wafer breakage or transfer faults.
What to verify before purchase
- Verify pneumatic port layout and valve configuration
- Confirm revision and cassette/Ergo module compatibility
- Check regulators, valves, and fittings for leakage
Confirm with the seller
- Exact internal pneumatic configuration is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.