Product description
Oxide clamping cylinder, 200 mm context reported.
Specifications and identifiers
identified features
| Component type | Clamping cylinder Mechanical/pneumatic clamping component. |
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| Application clue | Oxide Oxide process/module context appears in evidence. |
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| Size clue | 200 mm reported Verify against tool configuration. |
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Applications
process chamber hardwarewafer handlingPVD/CVD/etch modulestool maintenancewafer or chamber clampingoxide module maintenancepneumatic/mechanical cylinder replacement
How it works
A mechanical chamber or tool component used as a structural, mounting, cover, liner, or process-facing part.
Mechanical dimensions, process exposure, material, coating, and revision can affect fit and process compatibility.
What to verify before purchase
- Confirm bore/stroke, mounting, actuator type, seals, and exact tool platform.
- Verify whether the cylinder is pneumatic or mechanical and whether switches are included.
Confirm with the seller
- Exact actuator specifications are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.