Product description
Bottom plate / EH pump plate for Applied Materials part 0020-04043, with Sputter Etch context in several descriptions.
Specifications and identifiers
supported details
| Description | Bottom plate / plate bottom EH pump Main repeated mechanical description. |
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| Process context | Sputter Etch Indicates chamber or process family context. |
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| Alternate wording | Bottom cover One source describes the same part as a bottom cover. |
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Applications
chamber hardwarewafer handlingvacuum hardwareprocess module maintenanceChamber bottom plate or cover replacement.Sputter etch chamber hardware service.
How it works
A bottom plate used as a fitted mechanical part in a semiconductor process tool or wafer-handling subsystem.
Mechanical chamber parts must match dimensions, mounting features, material/coating, and process exposure requirements.
What to verify before purchase
- Confirm whether the installed item is referred to as a bottom plate, bottom cover, or EH pump plate in the target BOM.
- Verify dimensions, mounting holes, and material/coating.
Confirm with the seller
- Exact tool compatibility beyond the supported platform or description is not confirmed.
- Condition, calibration state, and service history are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.