Product description
Plate, gas distribution, small-hole/channel style
Specifications and identifiers
supported identifiers
| Description | Plate, gas distribution Repeated supported noun/function. |
|---|
| Feature wording | Small holes and channels Describes the flow-distribution geometry. |
|---|
| Revision observed | Rev C Revision appears in supported evidence; verify against the physical part. |
|---|
Applications
CVD or etch chamber gas distributionShowerhead or gas plate serviceProcess chamber refurbishmentCVD or etch chamber gas distributionShowerhead or gas plate serviceProcess chamber refurbishment
How it works
A gas distribution plate spreads process gas across a chamber or reaction zone through machined holes, slots, or channels.
Even flow distribution affects process uniformity, deposition/etch repeatability, and chamber matching.
What to verify before purchase
- Confirm revision, hole pattern, coating/cleaning status, and chamber/process compatibility.
Confirm with the seller
- Exact chamber model and process recipe compatibility are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.