Product description
Applied Materials 0020-04124 cover for a feedthrough / helium feedthrough.
Specifications and identifiers
identification
| Description | Feedthrough cover / helium feedthrough cover |
|---|
| Item type | Chamber/feedthrough mechanical cover |
|---|
Applications
PVD/CVD/etch chamber kitswafer-area consumablesESC and focus-ring stacksHelium feedthrough cover replacementChamber feedthrough protectionMechanical cover service
How it works
A shaped process-facing ring or chamber component used near a wafer, chuck, electrode, or gas path.
Geometry, material, coating, and cleanliness can affect plasma behavior, contamination risk, and fit.
Technical guide
aluminum
common lightweight chamber hardware material
ceramic
electrically insulating, process-compatible material used in chamber hardware
quartz
high-purity silica glass used in plasma or high-temperature environments
- ESC
- electrostatic chuck
What to verify before purchase
- Verify exact feedthrough location and revision
- Check dimensions and mounting features
- Confirm whether seals or hardware are included
Confirm with the seller
- Exact feedthrough assembly compatibility is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.