Product description
Quartz/glass 3.6 inch viewport window for Applied Materials chamber view-port service; repeated descriptions reference quartz, view port, and glass window wording.
Specifications and identifiers
identification
| Primary description | Quartz 3.6 inch viewport/window |
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| Material | Quartz / glass |
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| Size | 3.6 inch |
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| Application | Chamber viewport / view port |
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Applications
chamber view portsoptical monitoringquartz process windowsOptical view port windowReplacement quartz chamber window
How it works
A quartz viewport window allows optical access into a chamber while maintaining the chamber boundary.
Viewport material, diameter, thickness, cleanliness, and seal interface must match the chamber to maintain vacuum and optical performance.
Technical guide
quartz
High-purity silica material used for thermal and optical stability.
- UHV
- Ultra-high vacuum, when used as a cleanliness or vacuum-service descriptor.
- viewport
- Window through which a chamber can be viewed or optically monitored.
What to verify before purchase
- Confirm diameter, thickness, seal interface, revision suffix such as 0020-06315B if applicable, and cleanliness grade.
Confirm with the seller
- Exact revision and complete machine compatibility are not confirmed from the provided evidence alone.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.