AMAT 0020-06815 INSULATOR, GROUND PLATE, 152858AMAT 8310 Insulator, Ground Plate P/N 0020-068150020-06815 INSULATOR, GROUND PLATE, lot of 2AMAT 0020-06815 INSULATOR, GROUND PLATE, 152858Applied Materials 0020-06815 Semiconductor Part, Insulator, Ground Plate0020-06815 INSULATOR, GROUND PLATE, lot of 20020-06815 INSULATOR, GROUND PLATEApplied Materials 0020-06815 Semiconductor Part, Insulator, Ground PlateApplied Materials 0020-06815 Semiconductor Part, Insulator, Ground PlateAPPLIED MATERIALS (AMAT) 0020-06815    Semiconductor Part, Insulator, Ground PlaAPPLIED MATERIALS (AMAT) 0020-06815    Semiconductor Part, Insulator, Ground PlaApplied Materials  0020-06815  Semiconductor Part, Insulator, Ground Plate
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APPLIED MATERIALS 0020-06815

Ground Plate Insulator

Market Availability & Pricing

Part number0020-06815
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Chamber Components › Insulators
Ground Plate Insulator
APPLIED MATERIALS0020-06815Ground plate insulator
Product description
Applied Materials 0020-06815 insulator / ground plate insulator, associated with AMAT 8310 context in one source.
Specifications and identifiers
identification
DescriptionInsulator, ground plate
Platform noteAMAT 8310 appears in evidence; verify context
Applications
PVD/CVD chamber consumable stacksESC/focus/shadow/deposition ring setsthrottle valve and gas distribution hardwareGround-plate insulationChamber electrical isolationProcess-area insulating hardware
How it works

A process-facing ring or plate used around the wafer, chuck, throttle opening, or gas-distribution area inside a semiconductor process chamber.

Geometry, material, coating, cleanliness, and revision affect fit, plasma behavior, gas flow, contamination risk, and process repeatability.

Technical guide
aluminum

Common in chamber hardware; verify coating and cleaned/refurbished status.

ceramic

Often used for plasma-facing insulation and wear resistance when supported by part markings.

quartz

High-purity silica glass used in many plasma or thermal chamber locations.

ESC
electrostatic chuck
SNNF
process/context abbreviation seen in chamber part descriptions; verify against tool documentation
What to verify before purchase
  • Verify material and geometry
  • Confirm ground plate location and tool compatibility
  • Inspect for cracking, tracking, or burn marks
Confirm with the seller
  • Exact tool/chamber compatibility is not confirmed

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

AMAT 0020-06815 INSULATOR, GROUND PLATE, 152858

AMAT 0020-06815 INSULATOR, GROUND PLATE, 152858

USD 100.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Apr 5, 2024 18:30 UTC
End recorded: Dec 7, 2024 12:58 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 6, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

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AMAT 8310 Insulator, Ground Plate P/N 0020-06815

AMAT 8310 Insulator, Ground Plate P/N 0020-06815

USD 119.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
CN
Condition: Used
Listed: Aug 17, 2023 18:02 UTC
End recorded: Dec 7, 2024 13:35 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:24 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
0020-06815 INSULATOR, GROUND PLATE, lot of 2

0020-06815 INSULATOR, GROUND PLATE, lot of 2

USD 195.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 24, 2018 06:04 UTC
End recorded: Dec 7, 2024 04:24 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:12 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay

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