AMAT 0020-09112 Shaft, Slit Valve Chamber, 180034AMAT 0020-09112 SHAFT, SLIT VALVE CHAMBER, 178712AMAT 0020-09112 SHAFT, SLIT VALVE CHAMBER, 166088AMAT 0020-09112 SHAFT, SLIT VALVE CHAMBER, 146130AMAT 0020-09112 SHAFT, SLIT VALVE CHAMBER, 138719AMAT 0020-09112 SHAFT, SLIT VALVE CHAMBER, 1082240020-09112 / SHAFT, SLIT VALVE CHAMBER / AMAT0020-09112 / SHAFT, SLIT VALVE CHAMBER / AMATAPPLIED MATERIALS - 0020-09112 - SHAFT SLIT VALVE CHAMBER
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APPLIED MATERIALS 0020-09112

Slit Valve Chamber Shaft

Market Availability & Pricing

Part number0020-09112
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales142.89 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Slit Valve Components
Slit Valve Chamber Shaft
APPLIED MATERIALS0020-09112slit valve shaft
Product description
Shaft component for a slit-valve chamber assembly.
Specifications and identifiers
identified features
ComponentShaft
Mechanical shaft used in a slit-valve chamber mechanism.
Associated areaSlit valve chamber
Used around a chamber transfer or isolation valve.
Applications
Chamber hardwareWafer-handling hardwareProcess shields and coversService replacement partsSlit-valve actuation hardwareLoad-lock or transfer-chamber isolationChamber door mechanism service
How it works

A mechanical process-tool component used around chambers, wafer handling, shields, covers, brackets, or support assemblies.

Geometry, material, revision, coating, and wear condition can affect fit, sealing, contamination control, and process repeatability.

What to verify before purchase
  • Confirm shaft dimensions and surface finish.
  • Check for wear, galling, bending, or corrosion.
  • Verify compatibility with the slit-valve chamber revision.
Confirm with the seller
  • Exact chamber platform and dimensions are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

AMAT 0020-09112 Shaft, Slit Valve Chamber, 180034

AMAT 0020-09112 Shaft, Slit Valve Chamber, 180034

USD 185.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 12, 2024 22:21 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 10, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-09112 SHAFT, SLIT VALVE CHAMBER, 178712

AMAT 0020-09112 SHAFT, SLIT VALVE CHAMBER, 178712

USD 185.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Dec 2, 2024 23:00 UTC
End recorded: Dec 6, 2024 20:28 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 9, 2026 16:25 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-09112 SHAFT, SLIT VALVE CHAMBER, 166088

AMAT 0020-09112 SHAFT, SLIT VALVE CHAMBER, 166088

USD 185.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Aug 7, 2024 21:00 UTC
End recorded: Dec 6, 2024 20:20 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:24 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
No image available

158-0202 AMAT APPLIED 0020-09112 SHAFT, SLIT VALVE CHAMB [NEW]

USD 100.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Apr 1, 2024 09:30 UTC
End recorded: Dec 7, 2024 05:17 UTC
Estimated remaining at check: 3
Estimated sold at check: 0

eBay response captured — Checked Oct 6, 2026 16:02 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-09112 SHAFT, SLIT VALVE CHAMBER, 146130

AMAT 0020-09112 SHAFT, SLIT VALVE CHAMBER, 146130

USD 185.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Feb 7, 2024 23:00 UTC
End recorded: Dec 7, 2024 13:31 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:10 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-09112 SHAFT, SLIT VALVE CHAMBER, 138719

AMAT 0020-09112 SHAFT, SLIT VALVE CHAMBER, 138719

USD 185.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Dec 6, 2023 20:00 UTC
End recorded: Dec 7, 2024 08:29 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 4, 2026 16:07 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-09112 SHAFT, SLIT VALVE CHAMBER, 108224

AMAT 0020-09112 SHAFT, SLIT VALVE CHAMBER, 108224

USD 185.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Jul 18, 2022 22:30 UTC
End recorded: Dec 6, 2024 17:29 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:11 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay

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