Product description
Shim ring, 4 in, oxide application
Specifications and identifiers
supported identity
| Item type | Shim ring A spacing or alignment ring used to adjust fit or spacing in a chamber assembly. |
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| Size/context | 4 in oxide The provided evidence repeatedly ties the part to a 4 in oxide shim ring. |
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| Associated assembly context | Isolation valve/CVD context Some evidence associates the shim with isolation valve or CVD hardware. |
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Applications
process chamber kitswafer support and lift hardwareshielding and gas distributionmechanical motion assembliesChamber spacing or alignmentCVD/oxide process hardware serviceIsolation valve-related mechanical stackup
How it works
A shim ring is a mechanical process or handling component used inside or near a semiconductor process module.
Process-kit and handling components must match dimensions, material, coating, revision, and cleanliness requirements.
Technical guide
common
These parts may use aluminum, stainless steel, ceramic, quartz, graphite, elastomers, or coated surfaces depending on process use.
process_hardware
Chamber hardware controls gas flow, shielding, spacing, wafer support, and contamination control.
- CVD
- Chemical vapor deposition.
- ESC
- Electrostatic chuck.
- PVD
- Physical vapor deposition.
What to verify before purchase
- Verify inner diameter, outer diameter, thickness, and material.
- Confirm whether this is a standalone shim ring or part of a valve/hinge kit.
- Inspect for flatness and surface damage.
Confirm with the seller
- Exact dimensions and material are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.