AMAT 0020-10117 200mm TEOS Oxide Showerhead, 9020070020-10117 / PLATE PERF OXIDE 200MM - SHOWER HEAD TEOS / APPLIED MATERIALS AMATApplied Materials/AMAT Plate Perf Oxide 200mm PN: 0020-1011720475 APPLIED MATERIALS PLATE, PERFORATED OXIDE 200MM TEOS (PARTS) 0020-101178909 APPLIED MATERIALS PLATE, PERFORATED OXIDE 200MM TEOS 0020-101170020-10117 / PLATE PERF OXIDE 200MM - SHOWER HEAD TEOS / APPLIED MATERIALS AMAT0020-10117 / PLATE PERF OXIDE 200MM - SHOWER HEAD TEOS / APPLIED MATERIALS AMATOEM Part Applied Materials (AMAT) 0020-10117 PLATE PERF OXIDE 200MMApplied Materials Showerhead Teos Plate Perf Oxide 200MM AMAT 0020-101170020-10117 / PLATE PERF OXIDE 200MM - SHOWER HEAD TEOS / APPLIED MATERIALS AMATApplied Materials Showerhead Teos Plate Perf Oxide 200MM AMAT 0020-10117Applied Materials/AMAT Plate Perf Oxide 200mm PN: 0020-10117Applied Materials AMAT 0020-10117 Plate, Perforated OX 200mmApplied Materials Showerhead Teos Plate Perf Oxide 200MM AMAT 0020-101170020-10117 / PLATE PERF OXIDE 200MM / APPLIED MATERIALS AMAT0020-10117 PLATE, PERFORATED OX 200MM TEOSApplied Materials (AMAT) 0020-10117 PLATE PERF OXIDE 200MMAMAT 0020-10117 PLATE PERF OXIDE 200MM125-0301// AMAT APPLIED 0020-10117 PLATE PERF OXIDE 200MM USED0020-10117  AMAT PLATE PERF OXIDE 200MM DO NOT SELLAMAT 0020-10117 PLATE PERF OXIDE 200MMAMAT 0020-10117 PLATE PERF OXIDE 200MMAceCo S33-245A Perforated Plate 200mm New AMAT P/N 0020-10117
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APPLIED MATERIALS 0020-10117

200mm TEOS Perforated Oxide Plate

Market Availability & Pricing

Part number0020-10117
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales1898.5 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Chamber Plates & Showerheads
200mm TEOS Perforated Oxide Plate
APPLIED MATERIALS0020-10117perforated showerhead plate
Product description
Plate, perforated oxide, 200mm, TEOS showerhead/perforated plate.
Specifications and identifiers
identified features
Wafer size context200mm
Indicates use with 200mm process hardware.
Process contextTEOS oxide
TEOS is commonly associated with oxide CVD processes.
FormPerforated plate / showerhead
Perforations distribute gas or process flow across the wafer area.
Equipment context
  • TEOS CVD chamber
Applications
process chamber hardwarewafer handling hardwaremaintenance replacement partsTEOS oxide process chamber gas distribution200mm CVD chamber maintenance
How it works

A machined or fabricated component used in the process chamber, transfer area, or wafer-handling hardware.

Fit, coating, material, wafer size, and chamber position affect process compatibility and contamination control.

Technical guide
ASSY
Assembly
CVD
Chemical vapor deposition
PVD
Physical vapor deposition
What to verify before purchase
  • Verify hole pattern, diameter, surface condition, and cleaning status.
  • Confirm exact chamber/platform revision before installation.
Confirm with the seller
  • Exact tool model and material grade are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

AMAT 0020-10117 200mm TEOS Oxide Showerhead, 902007

AMAT 0020-10117 200mm TEOS Oxide Showerhead, 902007

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
IE
Condition: Used
Listed: Sep 23, 2026 13:16 UTC
Estimated remaining at check: 5
Estimated sold at check: 0

eBay response captured — Checked Oct 16, 2026 16:23 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
0020-10117 / PLATE PERF OXIDE 200MM - SHOWER HEAD TEOS / APPLIED MATERIALS AMAT

0020-10117 / PLATE PERF OXIDE 200MM - SHOWER HEAD TEOS / APPLIED MATERIALS AMAT

USD 1151.0400

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 14, 2026 06:17 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Applied Materials/AMAT Plate Perf Oxide 200mm PN: 0020-10117

Applied Materials/AMAT Plate Perf Oxide 200mm PN: 0020-10117

USD 800.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 7, 2023 20:00 UTC
End recorded: Dec 7, 2024 02:52 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 4, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
20475 APPLIED MATERIALS PLATE, PERFORATED OXIDE 200MM TEOS (PARTS) 0020-10117

20475 APPLIED MATERIALS PLATE, PERFORATED OXIDE 200MM TEOS (PARTS) 0020-10117

USD 467.76

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Aug 27, 2020 03:57 UTC
End recorded: Dec 7, 2024 13:41 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 21, 2026 11:15 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
8909 APPLIED MATERIALS PLATE, PERFORATED OXIDE 200MM TEOS 0020-10117

8909 APPLIED MATERIALS PLATE, PERFORATED OXIDE 200MM TEOS 0020-10117

USD 632.1800

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Jun 8, 2017 08:28 UTC
End recorded: Dec 7, 2024 02:40 UTC
Estimated remaining at check: 19
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:03 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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