Applied Materials 0020-20512 SHLD HTR RF TOP AMAT (M)AMAT 0020-20512 Shield Heater RF TOP, 115041AMAT 0020-20512 Shield Heater RF TOP, 111149AMAT 0020-20512 Shield Heater RF TOP, 111148AMAT 0020-20512 Shield Heater RF TOP, 111085AMAT 0020-20512 Shield Heater RF TOP, 111084AMAT 0020-20512 Shield Heater RF TOP, 111041AMAT 0020-20512 REV H Shield Heater RF TOP , 111042343-0202// AMAT APPLIED 0020-20512 APPLIED MATRIALS COMPONENTS USEDAMAT 0020-20512 Shield Heater RF TOP, 111011AMAT 0020-20512 Shield Heater RF Top, 415702
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APPLIED MATERIALS 0020-20512

RF Top Heater Shield

Market Availability & Pricing

Part number0020-20512
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Chamber Components › Shields & Liners
RF Top Heater Shield
APPLIED MATERIALS0020-20512Heater shield
Product description
Applied Materials 0020-20512 top RF heater shield / shield heater RF top.
Specifications and identifiers
identification
DescriptionShield heater RF top / RF top heater shield
Reported revisionRev H appears in one title; verify label
Applications
PVD/CVD/etch chamber kitswafer-area consumablesESC and focus-ring stacksRF top shield replacementHeater/chamber shield serviceProcess chamber mechanical maintenance
How it works

A shaped process-facing ring or chamber component used near a wafer, chuck, electrode, or gas path.

Geometry, material, coating, and cleanliness can affect plasma behavior, contamination risk, and fit.

Technical guide
aluminum

common lightweight chamber hardware material

ceramic

electrically insulating, process-compatible material used in chamber hardware

quartz

high-purity silica glass used in plasma or high-temperature environments

ESC
electrostatic chuck
What to verify before purchase
  • Verify revision and exact chamber location
  • Inspect for wear, arcing, deposits, and warping
  • Confirm material/coating requirements
Confirm with the seller
  • Exact chamber and material are not confirmed

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Applied Materials 0020-20512 SHLD HTR RF TOP AMAT (M)

Applied Materials 0020-20512 SHLD HTR RF TOP AMAT (M)

USD 200.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Feb 27, 2026 02:56 UTC
End recorded: Apr 23, 2026 06:04 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 14, 2026 16:23 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

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AMAT 0020-20512 Shield Heater RF TOP, 115041

AMAT 0020-20512 Shield Heater RF TOP, 115041

USD 300.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Mar 14, 2023 17:00 UTC
End recorded: Dec 6, 2024 20:16 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-20512 Shield Heater RF TOP, 111149

AMAT 0020-20512 Shield Heater RF TOP, 111149

USD 300.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Nov 3, 2022 18:30 UTC
End recorded: Dec 7, 2024 00:51 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:24 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-20512 Shield Heater RF TOP, 111148

AMAT 0020-20512 Shield Heater RF TOP, 111148

USD 300.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Nov 3, 2022 18:30 UTC
End recorded: Dec 7, 2024 00:51 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:24 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-20512 Shield Heater RF TOP, 111085

AMAT 0020-20512 Shield Heater RF TOP, 111085

USD 300.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Nov 2, 2022 21:00 UTC
End recorded: Dec 7, 2024 14:52 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:24 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-20512 Shield Heater RF TOP, 111084

AMAT 0020-20512 Shield Heater RF TOP, 111084

USD 300.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Nov 2, 2022 21:00 UTC
End recorded: Dec 7, 2024 14:52 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:24 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-20512 Shield Heater RF TOP, 111041

AMAT 0020-20512 Shield Heater RF TOP, 111041

USD 300.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Nov 2, 2022 17:00 UTC
End recorded: Dec 6, 2024 16:40 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:24 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-20512 REV H Shield Heater RF TOP , 111042

AMAT 0020-20512 REV H Shield Heater RF TOP , 111042

USD 300.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Nov 2, 2022 17:00 UTC
End recorded: Dec 6, 2024 16:39 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:24 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
343-0202// AMAT APPLIED 0020-20512 APPLIED MATRIALS COMPONENTS USED

343-0202// AMAT APPLIED 0020-20512 APPLIED MATRIALS COMPONENTS USED

USD 250.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Sep 11, 2018 04:34 UTC
End recorded: Dec 7, 2024 04:21 UTC
Estimated remaining at check: 3
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:12 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay

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