Product description
Spacer, insulator, lifter
Specifications and identifiers
identification
| Function | Insulating spacer for lifter assembly |
|---|
materials
| Material | Insulating material not specified Exact material should be verified from drawing or package. |
|---|
Applications
Process chambersWafer processing hardwareVacuum chamber servicePreventive maintenance kitsLifter mechanism insulationChamber hardware spacing/alignment
How it works
A mechanical process-tool component used for shielding, spacing, sealing, mounting, confinement, or chamber geometry control.
Material, coating, dimensions, process position, and surface condition can affect plasma behavior, contamination risk, and mechanical fit.
Technical guide
- CVD
- Chemical vapor deposition.
- ESC
- Electrostatic chuck.
- QTZ
- Quartz.
- SST
- Stainless steel.
What to verify before purchase
- Material and dimensions
- Lifter assembly compatibility
- Condition and chips/cracks
Confirm with the seller
- Specific tool serial-number compatibility
- Current calibration or functional test status
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.