AMAT 0020-20676 Cover Preclean/Cool Down Monolith, 154576AMAT 0020-20676 Chamber Cover, 151183AMAT 0020-20676 CHAMBER COVER, EEP-G-217, 104455APPLIED MATERIALS AMAT ENDURA PRECLEAN COVER 0020-206768463 APPLIED MATERIALS COVER PRECLEAN/COOL DOWN MONOLITH 0020-20676AMAT 0020-20676, EEP-G-275, Cover, Preclean, Cooldown Monolith. 418574AMAT 0020-20676 EEP-G-065 OBS, COVER PRECLEAN COOLDOWNAMAT 0020-20676 OBS, COVER PRECLEAN COOLDOWNAMAT 0020-20676 Chamber CoverApplied Materials AMAT 0020-20676 Endura Preclean Cover134-0201// AMAT APPLIED 0240-13068 0020-20676 KIT, PURCHASED LID POSITION ASISAMAT 0020-20676 OBS COVER PRECLEAN/COOL DOWN MONOLITHAPPLIED MATERIALS 0020-20676 CVR PORCLEAN  COOL DWAPPLIED MATERIALS AMAT ENDURA PRECLEAN COVER 0020-20676APPLIED MATERIALS AMAT ENDURA PRECLEAN COVER 0020-20676APPLIED MATERIALS AMAT ENDURA PRECLEAN COVER 0020-20676
Image 1 of 16

APPLIED MATERIALS 0020-20676

Preclean/Cooldown Chamber Cover

Market Availability & Pricing

Part number0020-20676
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales149 (currency not captured) — public listing price; reported sold quantity is not a verified transaction. Recorded acceptance: Accepted price not disclosed
Mechanical › Chamber Components › Chamber Covers
Preclean/Cooldown Chamber Cover
APPLIED MATERIALS0020-20676Chamber cover
Product description
Preclean/cooldown monolith chamber cover; also referenced with Endura preclean cover and EEP-G-series markings.
Specifications and identifiers
identification
FunctionCover for preclean/cooldown monolith
Process/chamber cover used around preclean or cooldown module hardware.
Platform/contextEndura preclean
Is referenced in several descriptions.
Associated kit/part reference0240-13068
Is referenced with this item in some descriptions.
Drawing/vendor markingsEEP-G-065 / EEP-G-217 / EEP-G-275
Variant markings appear; verify exact marking on the part.
Applications
process chamber hardwarewafer handling assembliesvacuum and gas delivery hardwareEndura preclean/cooldown chamber coverprocess module cover replacement
How it works

A machined or formed mechanical component provides structure, spacing, sealing, shielding, or positioning in a semiconductor process module.

Geometry, material, surface finish, and cleanliness strongly affect fit, particle performance, and process compatibility.

Technical guide
ID
Inside diameter.
OD
Outside diameter.
Rev
Revision; an engineering change level that may affect fit or compatibility.
What to verify before purchase
  • Verify exact EEP-G marking, revision, and whether it is a cover only or part of a kit.
  • Inspect process-facing surfaces and mounting holes.
Confirm with the seller
  • Exact Endura chamber variant and whether 0240-13068 kit contents are included.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

AMAT 0020-20676 Cover Preclean/Cool Down Monolith, 154576

AMAT 0020-20676 Cover Preclean/Cool Down Monolith, 154576

USD 1100.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Apr 22, 2024 23:00 UTC
End recorded: Dec 7, 2024 01:22 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 6, 2026 16:09 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-20676 Chamber Cover, 151183

AMAT 0020-20676 Chamber Cover, 151183

USD 750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Mar 21, 2024 21:30 UTC
End recorded: Jan 26, 2025 20:10 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 6, 2026 16:00 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-20676 CHAMBER COVER, EEP-G-217, 104455

AMAT 0020-20676 CHAMBER COVER, EEP-G-217, 104455

USD 750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Mar 28, 2023 17:00 UTC
End recorded: Dec 7, 2024 08:49 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
APPLIED MATERIALS AMAT ENDURA PRECLEAN COVER 0020-20676

APPLIED MATERIALS AMAT ENDURA PRECLEAN COVER 0020-20676

USD 200.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Aug 28, 2019 21:49 UTC
End recorded: Dec 7, 2024 07:40 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 20, 2026 16:02 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
No image available

134-0201 AMAT APPLIED 0020-20676 (UNCLEAN) COVER PRECLEAN/COOL DOWN MONOL USED

USD 300.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Nov 16, 2018 02:03 UTC
End recorded: Dec 7, 2024 04:51 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:15 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
No image available

134-0201// AMAT APPLIED 0240-13068 0020-20676 COVER PRECLEAN/COOL DOWN USED

USD 600.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Nov 16, 2018 02:03 UTC
End recorded: Dec 7, 2024 04:51 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:15 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
8463 APPLIED MATERIALS COVER PRECLEAN/COOL DOWN MONOLITH 0020-20676

8463 APPLIED MATERIALS COVER PRECLEAN/COOL DOWN MONOLITH 0020-20676

USD 526.8200

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Apr 28, 2017 02:23 UTC
End recorded: Dec 7, 2024 02:24 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:02 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-20676, EEP-G-275, Cover, Preclean, Cooldown Monolith. 418574

AMAT 0020-20676, EEP-G-275, Cover, Preclean, Cooldown Monolith. 418574

USD 850.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Nov 16, 2016 00:16 UTC
End recorded: Dec 7, 2024 01:09 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 18, 2026 16:20 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-20676 EEP-G-065 OBS, COVER PRECLEAN COOLDOWN

AMAT 0020-20676 EEP-G-065 OBS, COVER PRECLEAN COOLDOWN

USD 750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 19, 2014 22:19 UTC
End recorded: Dec 6, 2024 18:49 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 17, 2026 16:12 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-20676 OBS, COVER PRECLEAN COOLDOWN

AMAT 0020-20676 OBS, COVER PRECLEAN COOLDOWN

USD 750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 19, 2014 22:11 UTC
End recorded: Dec 6, 2024 18:49 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 17, 2026 16:12 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-20676 Chamber Cover

AMAT 0020-20676 Chamber Cover

USD 750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jan 28, 2014 21:25 UTC
End recorded: Dec 6, 2024 18:40 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 17, 2026 16:12 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

Direct marketplace listings

0 matching listings.

No active-status direct listings are shown on this page.

Marketplace search uses listing titles and service keywords, with quoted phrases and -excluded terms.