Product description
Applied Materials 0020-21200 cover shield for preclean chamber context.
Specifications and identifiers
identification
| Description | Cover shield |
|---|
| Process/module context | Preclean |
|---|
Applications
PVD/CVD chamber kitsESC and cathode stacksprocess chamber liner and shield replacementPreclean chamber shield replacementProcess-facing cover shield serviceContamination control shield hardware
How it works
A process-facing ring, liner, shield, or ceramic/quartz chamber component used around the wafer or chamber opening.
Geometry, material, surface condition, and cleanliness affect process uniformity, plasma behavior, particle risk, and fit.
Technical guide
alumina
ceramic material used where electrical insulation and plasma compatibility are needed
aluminum
common chamber hardware material when compatible with the process
quartz
high-purity silica glass used for plasma-facing or high-temperature parts
- ESC
- electrostatic chuck
- PVD
- physical vapor deposition
What to verify before purchase
- Verify preclean chamber configuration
- Inspect for erosion, warping, and deposits
- Confirm revision and coating/cleaning requirements
Confirm with the seller
- Exact tool/chamber compatibility is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.