AMAt 0020-21200 Cover Shield Preclean, 144127AMAT 0020-21200 COVER SHIELD, PRECLEAN, 137086AMAT 0020-21200 COVER SHIELD, 104953AMAT 0020-21200 COVER SHIELD, 104954AMAT 0020-21200 COVER SHIELD, 104952AMAT 0020-21200 COVER SHIELD, 104928AMAT 0020-21200 COVER SHIELD, 104897AMAT 0020-21200 COVER SHIELD, 104898AMAT 0020-21200 COVER SHIELD, 104590AMAT 0020-21200 COVER SHIELD, PRECLEAN, 114300AMAT 0020-21200 COVER SHIELD, PRECLEAN, 112027Applied Materials (AMAT) 0020-21200   COVER SHIELD, PRECLEAN
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APPLIED MATERIALS 0020-21200

Preclean Cover Shield

Market Availability & Pricing

Part number0020-21200
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Chamber Components › Shields & Liners
Preclean Cover Shield
APPLIED MATERIALS0020-21200Cover shield
Product description
Applied Materials 0020-21200 cover shield for preclean chamber context.
Specifications and identifiers
identification
DescriptionCover shield
Process/module contextPreclean
Applications
PVD/CVD chamber kitsESC and cathode stacksprocess chamber liner and shield replacementPreclean chamber shield replacementProcess-facing cover shield serviceContamination control shield hardware
How it works

A process-facing ring, liner, shield, or ceramic/quartz chamber component used around the wafer or chamber opening.

Geometry, material, surface condition, and cleanliness affect process uniformity, plasma behavior, particle risk, and fit.

Technical guide
alumina

ceramic material used where electrical insulation and plasma compatibility are needed

aluminum

common chamber hardware material when compatible with the process

quartz

high-purity silica glass used for plasma-facing or high-temperature parts

ESC
electrostatic chuck
PVD
physical vapor deposition
What to verify before purchase
  • Verify preclean chamber configuration
  • Inspect for erosion, warping, and deposits
  • Confirm revision and coating/cleaning requirements
Confirm with the seller
  • Exact tool/chamber compatibility is not confirmed

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

AMAt 0020-21200 Cover Shield Preclean, 144127

AMAt 0020-21200 Cover Shield Preclean, 144127

USD 175.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jan 19, 2024 18:30 UTC
End recorded: Dec 6, 2024 21:12 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:03 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

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AMAT 0020-21200 COVER SHIELD, PRECLEAN, 137086

AMAT 0020-21200 COVER SHIELD, PRECLEAN, 137086

USD 175.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Nov 22, 2023 19:00 UTC
End recorded: Dec 7, 2024 01:52 UTC
Estimated remaining at check: 26
Estimated sold at check: 0

eBay response captured — Checked Oct 3, 2026 16:25 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

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AMAT 0020-21200 COVER SHIELD, 104954

AMAT 0020-21200 COVER SHIELD, 104954

USD 175.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Apr 11, 2023 20:30 UTC
End recorded: Dec 7, 2024 14:50 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-21200 COVER SHIELD, 104953

AMAT 0020-21200 COVER SHIELD, 104953

USD 175.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Apr 11, 2023 20:30 UTC
End recorded: Dec 7, 2024 14:51 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:22 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-21200 COVER SHIELD, 104952

AMAT 0020-21200 COVER SHIELD, 104952

USD 175.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Apr 11, 2023 20:00 UTC
End recorded: Dec 7, 2024 12:23 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-21200 COVER SHIELD, 104928

AMAT 0020-21200 COVER SHIELD, 104928

USD 175.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Apr 11, 2023 01:00 UTC
End recorded: Dec 7, 2024 03:43 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-21200 COVER SHIELD, 104897

AMAT 0020-21200 COVER SHIELD, 104897

USD 175.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Apr 11, 2023 01:00 UTC
End recorded: Dec 7, 2024 03:42 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-21200 COVER SHIELD, 104898

AMAT 0020-21200 COVER SHIELD, 104898

USD 175.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Apr 10, 2023 21:00 UTC
End recorded: Dec 7, 2024 03:42 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-21200 COVER SHIELD, 104590

AMAT 0020-21200 COVER SHIELD, 104590

USD 175.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Mar 29, 2023 21:30 UTC
End recorded: Dec 7, 2024 12:45 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:20 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-21200 COVER SHIELD, PRECLEAN, 114300

AMAT 0020-21200 COVER SHIELD, PRECLEAN, 114300

USD 175.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 2, 2023 00:30 UTC
End recorded: Dec 6, 2024 23:20 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:13 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-21200 COVER SHIELD, PRECLEAN, 112027

AMAT 0020-21200 COVER SHIELD, PRECLEAN, 112027

USD 175.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Dec 1, 2022 20:30 UTC
End recorded: Dec 6, 2024 21:56 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay

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