Product description
Clamp, lower 8 inch collimator shield
Specifications and identifiers
identification
| Function | Clamp for lower collimator shield |
|---|
| Size | 8 inch |
|---|
Applications
Process chambersWafer processing hardwareVacuum chamber servicePreventive maintenance kitsCollimator/shield retentionPVD or chamber shield hardware replacement
How it works
A mechanical process-tool component used for shielding, spacing, sealing, mounting, confinement, or chamber geometry control.
Material, coating, dimensions, process position, and surface condition can affect plasma behavior, contamination risk, and mechanical fit.
Technical guide
- CVD
- Chemical vapor deposition.
- ESC
- Electrostatic chuck.
- QTZ
- Quartz.
- SST
- Stainless steel.
What to verify before purchase
- Clamp dimensions
- Shield/collimator compatibility
- Surface condition and wear
Confirm with the seller
- Specific tool serial-number compatibility
- Current calibration or functional test status
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.