Product description
Lower collimator shield, 8 inch context, for Applied Materials equipment; one source also references Co-Ti context.
Specifications and identifiers
physical
| Component type | Lower collimator shield |
|---|
| Size | 8 inch |
|---|
| Material/process context | Co-Ti Referenced in one source; verify before treating as universal. |
|---|
Applications
PVD chamber kitsEtch chamber kitsCVD process hardwareESC-adjacent ringsPVD collimator/shield hardwareLower chamber shield replacement
How it works
A ring, cover, focus ring, clamp ring, or shield sits around the wafer/process area to control plasma exposure, deposition, containment, or mechanical alignment.
Small differences in profile, wafer size, material, and revision can affect process uniformity and chamber compatibility.
Technical guide
Vespel
Polyimide material used for heat-resistant, low-wear parts.
ceramic
Hard, insulating, plasma-resistant material used in some chamber rings and shields.
poly
Polymer material context from the provided evidence; verify exact material grade.
- clamp_ring
- A ring used to hold, locate, or clamp process hardware or wafer-related components.
- focus_ring
- A ring near the wafer edge that helps shape plasma or process conditions.
What to verify before purchase
- Verify dimensions, material/coating, process family, and cleaned/new condition.
- Confirm whether Co-Ti context applies to the specific item.
Confirm with the seller
- Exact material/coating and chamber compatibility are not fully confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.