0020-22652, AMAT, HONEYCOMB COLLIMATOR 1/2 HEX, 1.5:1 11.NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1NEW AMAT 0020-22652 6" Hex Foil Collimator Plate 1.5:1
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APPLIED MATERIALS 0020-22652

6 inch Honeycomb Collimator Plate

Market Availability & Pricing

Part number0020-22652
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › PVD Source Components › Collimators
6 inch Honeycomb Collimator Plate
APPLIED MATERIALS0020-22652collimator plate
Product description
6 in Hex Foil / Honeycomb Collimator Plate, 1.5:1
Specifications and identifiers
evidence backed details
Supported description6 in Hex Foil / Honeycomb Collimator Plate, 1.5:1
Normalized from repeated listing-title evidence.
Size6 in
GeometryHoneycomb / 1/2 hex
Ratio1.5:1
Evidence count2
Number of listing-title sources provided in the request.
Applications
PVD source assemblieswafer process kitsdeposition chambersPVD source assemblieswafer process kitsdeposition chambers
How it works

A collimator is a chamber/source component with passages that shape particle or vapor trajectories.

Geometry and material affect process uniformity and contamination risk.

What to verify before purchase
  • Confirm exact revision and dash/variant number against the installed assembly.
  • Verify physical dimensions, material/coating, connector/port style, and cleanliness/condition.
  • Check whether the listing is for the complete assembly or only a subcomponent.
Confirm with the seller
  • Exact OEM bill-of-material relationship beyond the listing-title evidence.
  • Tool/chamber compatibility unless specifically named in the provided evidence.
  • Electrical ratings, pressure ratings, coating thickness, or material grade unless stated in the title evidence.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

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