Product description
Adapter, collimator source, 13 inch.
Specifications and identifiers
supported identity
| Function | Collimator source adapter Supports or adapts a collimator/source region in a process chamber. |
|---|
| Size term | 13 inch Repeated evidence includes the 13-inch descriptor. |
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| Form | Adapter plate Some evidence describes it as a plate-style adapter. |
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Equipment context
- Applied Materials PVD source/collimator assemblies
Applications
process chamber hardwarerobot or wafer handling hardwarevacuum body hardwarePVD/source-area adapter hardwarecollimator source mountingprocess chamber service
How it works
A mechanical chamber, robot, or mounting component used to position, support, seal, shield, or guide a subsystem.
Fit, orientation, material, revision, and surface condition are critical in vacuum and process environments.
Technical guide
evidence_scope
Use the supported material terms only where repeated in evidence; otherwise verify from markings or drawings.
typical
application-dependent metal, ceramic, quartz, elastomer, or engineered polymer
vacuum_hardware
hardware used in reduced-pressure process environments
- Assy
- assembly
- ID
- inside diameter
- OD
- outside diameter
What to verify before purchase
- Verify exact revision and configuration against tool BOM or installed part markings.
- Confirm physical condition, connector/keying, and cleanliness before installation.
Confirm with the seller
- Exact tool compatibility beyond the supported description.
- Detailed dimensional drawing and full material specification.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.