AMAT 0020-23278 Upper Shield, 12.9" Source, SST, 1938050020-23278 / SHIELD, UPPER,ENDURA HOT-E-CHUCK AL / APPLIED MATEIALSAMAT 0020-23278 Upper Shield, 12.9" Source, SST, 147403AMAT 0020-23278 UPPER SHIELD, 147117AMAT 0020-23278 Upper Shield, 12.9" Source, SST, 145098AMAT 0020-23278 Upper Shield, 12.9" Source, SST, 144788AMAT 0020-23278 SHIELD, 124163AMAT 0020-23278 SHIELD, 124164AMAT 0020-23278 SHIELD, 124149AMAT 0020-23278 SHIELD UPPER, SST, 8" 101% TIN, 233-3883-77, 123513AMAT 0020-23278 SHIELD UPPER, SST, 8" 101% TIN, 123512AMAT 0020-23278 SHIELD UPPER, SST, 8" 101% TIN, 123421AMAT 0020-23278 SHIELD UPPER, SST, 8" 101% TIN, 233-3883-77, 123422AMAT 0020-23278 Upper Shield, SST, 8", INT, 118593AMAT 0020-23278 UPPER SHIELD, 104821AMAT 0020-23278 Upper Shield, SST, 8", INT, 112709AMAT 0020-23278 Upper Shield, SST, 8", INT, 112710AMAT 0020-23278 Upper Shield, SST, 8", INT, 112711AMAT 0020-23278 Upper Shield, SST, 8", INT, 112712AMAT 0020-23278 Upper Shield, SST, 8", INT, 112713AMAT 0020-23278 Upper Shield, SST, 8", INT, 112714AMAT 0020-23278 Upper Shield, SST, 8", INT, 112715AMAT 0020-23278 Upper Shield, SST, 8", INT, 112716AMAT 0020-23278 Upper Shield, SST, 8", INT, 112707AMAT 0020-23278 Upper Shield, SST, 8", INT, 112708AMAT 0020-23278 UPPER SHIELD, 112440AMAT Applied Materials 0020-23278 8” SST Upper Shield 101% TIN Used WorkingAMAT 0020-23278 Shield Upper, 12.9" Source, SST, 415665AMAT 0020-23278 Shield Upper, 12.9" Source, SST, 112207AMAT 0020-23278 Shield Upper, 12.9" Source, SST, 112195AMAT 0020-23278 Shield Upper, 12.9" Source, SST, 112196Applied Materials/AMAT 0020-23278 SHIELD, UPPERAMAT 0020-23278 Upper Shield, SST, 8", INT, 112765121-0501// AMAT APPLIED 0020-23278 SHIELD UPPER, SST, 8" 101% TIN 2ND SOURCE NEW0020-23278 SHIELD UPPER, SST, 8" 101% TIN21058 APPLIED MATERIALS SHIELD UPPER, SST, 8 101% TIN (NEW) 0020-23278121-0501// AMAT APPLIED 0020-23278 SHIELD UPPER, SST, 8" 101% TIN NEWAMAT 0020-23278 Upper Shield, 12.9" Source, SST 424217AMAT 0020-23278 Upper Shield, 12.9" Source, SST, 4241670020-23278 SHIELD UPPER, SST, 8" 101% TINApplied Materials (AMAT) 0020-23278 SHIELD UPPER, SST, 8" 101% TINOEM Part Applied Materails (AMAT) 0020-23278 SHIELD UPPER, SST, 8" 101% TINOEM Part   Applied Materails (AMAT) 0020-23278 SHIELD UPPER, SST, 8 101% TIN"NEW Applied Materials/AMAT 0020-23278 A 8" Source SST Upper Shield 101% TINNEW Applied Materials/AMAT 0020-23278 A 8" Source SST Upper Shield 101% TINNEW Applied Materials/AMAT 0020-23278 A 8" Source SST Upper Shield 101% TINNEW Applied Materials/AMAT 0020-23278 A 8" Source SST Upper Shield 101% TINNEW Applied Materials/AMAT 0020-23278 A 8" Source SST Upper Shield 101% TIN
Image 1 of 48

APPLIED MATERIALS 0020-23278

SST Upper Shield

Market Availability & Pricing

Part number0020-23278
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales300 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Shields & Liners
SST Upper Shield
APPLIED MATERIALS0020-23278Upper chamber shield
Product description
Upper shield, 8 inch / 12.9 inch source context, SST, TiN/TIN second-source evidence for AMAT PVD chamber use.
Specifications and identifiers
evidence
Repeated item nounUpper Shield
Titles consistently identify a chamber upper shield.
Material/coatingSST and TIN/TiN appear in titles
Verify material and coating; titles vary in wording.
Size/context8 inch / 12.9 inch source appears in titles
Potential wording variation; measure and match tool configuration.
Equipment context
  • Applied Materials PVD chamber context
Applications
PVD chambersEtch/CVD chamber consumablesWafer edge and source shieldingPVD chamber shield replacementSource-area shielding
How it works

A process shield/ring is a chamber hardware component that helps confine deposition/etch byproducts and protects surrounding chamber surfaces.

Geometry, material, coating, and process history affect fit, particle control, and process compatibility.

Technical guide
SST

Stainless steel when the title says SST.

TIN

Likely titanium nitride coating/context when stated as TIN/TiN in chamber shielding evidence; verify coating.

G12
Source/title code; do not assume exact meaning without OEM documentation.
PVD
Physical vapor deposition
SST
Stainless steel
What to verify before purchase
  • Confirm exact revision/configuration and physical condition before purchase.
  • Match connector style, mounting, and installed subassemblies against tool requirements.
Confirm with the seller
  • Exact OEM tool compatibility beyond evidence text is not independently confirmed.
  • Revision interchangeability is not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

AMAT 0020-23278 Upper Shield, 12.9" Source, SST, 193805

AMAT 0020-23278 Upper Shield, 12.9" Source, SST, 193805

USD 300.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 17, 2025 16:17 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 14, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
0020-23278 / SHIELD, UPPER,ENDURA HOT-E-CHUCK AL / APPLIED MATEIALS

0020-23278 / SHIELD, UPPER,ENDURA HOT-E-CHUCK AL / APPLIED MATEIALS

USD 295.8900

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jul 31, 2024 22:00 UTC
End recorded: Dec 7, 2024 13:21 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:22 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

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AMAT 0020-23278 Upper Shield, 12.9" Source, SST, 147403

AMAT 0020-23278 Upper Shield, 12.9" Source, SST, 147403

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 20, 2024 00:00 UTC
End recorded: Dec 6, 2024 23:29 UTC
Estimated remaining at check: 3
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:14 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

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AMAT 0020-23278 UPPER SHIELD, 147117

AMAT 0020-23278 UPPER SHIELD, 147117

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Feb 16, 2024 17:30 UTC
End recorded: Dec 7, 2024 02:32 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:13 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-23278 Upper Shield, 12.9" Source, SST, 145098

AMAT 0020-23278 Upper Shield, 12.9" Source, SST, 145098

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jan 30, 2024 01:30 UTC
End recorded: Dec 7, 2024 05:27 UTC
Estimated remaining at check: 4
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:06 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-23278 Upper Shield, 12.9" Source, SST, 144788

AMAT 0020-23278 Upper Shield, 12.9" Source, SST, 144788

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jan 25, 2024 20:30 UTC
End recorded: Dec 6, 2024 16:51 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:05 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-23278 SHIELD, 124164

AMAT 0020-23278 SHIELD, 124164

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Aug 4, 2023 18:00 UTC
End recorded: Dec 7, 2024 09:35 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:20 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-23278 SHIELD, 124163

AMAT 0020-23278 SHIELD, 124163

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Aug 4, 2023 18:00 UTC
End recorded: Dec 7, 2024 09:40 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:20 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-23278 SHIELD, 124149

AMAT 0020-23278 SHIELD, 124149

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Aug 4, 2023 16:30 UTC
End recorded: Dec 7, 2024 02:49 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:20 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-23278 SHIELD UPPER, SST, 8" 101% TIN, 233-3883-77, 123513

AMAT 0020-23278 SHIELD UPPER, SST, 8" 101% TIN, 233-3883-77, 123513

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jul 27, 2023 20:00 UTC
End recorded: Dec 7, 2024 07:54 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-23278 SHIELD UPPER, SST, 8" 101% TIN, 123512

AMAT 0020-23278 SHIELD UPPER, SST, 8" 101% TIN, 123512

USD 1100.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Jul 27, 2023 20:00 UTC
End recorded: Dec 7, 2024 07:55 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-23278 SHIELD UPPER, SST, 8" 101% TIN, 123421

AMAT 0020-23278 SHIELD UPPER, SST, 8" 101% TIN, 123421

USD 1750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Jul 26, 2023 23:30 UTC
End recorded: Dec 7, 2024 07:14 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-23278 SHIELD UPPER, SST, 8" 101% TIN, 233-3883-77, 123422

AMAT 0020-23278 SHIELD UPPER, SST, 8" 101% TIN, 233-3883-77, 123422

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jul 26, 2023 23:30 UTC
End recorded: Dec 7, 2024 07:14 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-23278 Upper Shield, SST, 8", INT, 118593

AMAT 0020-23278 Upper Shield, SST, 8", INT, 118593

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: May 31, 2023 18:30 UTC
End recorded: Dec 6, 2024 17:09 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:05 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-23278 UPPER SHIELD, 104821

AMAT 0020-23278 UPPER SHIELD, 104821

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Apr 7, 2023 23:00 UTC
End recorded: Dec 6, 2024 23:05 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-23278 Upper Shield, SST, 8", INT, 112711

AMAT 0020-23278 Upper Shield, SST, 8", INT, 112711

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 29, 2022 20:00 UTC
End recorded: Dec 6, 2024 22:01 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-23278 Upper Shield, SST, 8", INT, 112710

AMAT 0020-23278 Upper Shield, SST, 8", INT, 112710

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 29, 2022 20:00 UTC
End recorded: Dec 6, 2024 22:01 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-23278 Upper Shield, SST, 8", INT, 112709

AMAT 0020-23278 Upper Shield, SST, 8", INT, 112709

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 29, 2022 20:00 UTC
End recorded: Dec 6, 2024 22:01 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-23278 Upper Shield, SST, 8", INT, 112715

AMAT 0020-23278 Upper Shield, SST, 8", INT, 112715

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 29, 2022 20:00 UTC
End recorded: Dec 6, 2024 22:00 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-23278 Upper Shield, SST, 8", INT, 112714

AMAT 0020-23278 Upper Shield, SST, 8", INT, 112714

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 29, 2022 20:00 UTC
End recorded: Dec 6, 2024 22:00 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-23278 Upper Shield, SST, 8", INT, 112713

AMAT 0020-23278 Upper Shield, SST, 8", INT, 112713

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 29, 2022 20:00 UTC
End recorded: Dec 6, 2024 22:00 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-23278 Upper Shield, SST, 8", INT, 112712

AMAT 0020-23278 Upper Shield, SST, 8", INT, 112712

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 29, 2022 20:00 UTC
End recorded: Dec 6, 2024 22:01 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-23278 Upper Shield, SST, 8", INT, 112716

AMAT 0020-23278 Upper Shield, SST, 8", INT, 112716

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 29, 2022 20:00 UTC
End recorded: Dec 6, 2024 22:00 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-23278 Upper Shield, SST, 8", INT, 112708

AMAT 0020-23278 Upper Shield, SST, 8", INT, 112708

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 29, 2022 20:00 UTC
End recorded: Dec 6, 2024 22:01 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-23278 Upper Shield, SST, 8", INT, 112707

AMAT 0020-23278 Upper Shield, SST, 8", INT, 112707

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 29, 2022 20:00 UTC
End recorded: Dec 6, 2024 22:01 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0020-23278 UPPER SHIELD, 112440

AMAT 0020-23278 UPPER SHIELD, 112440

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 21, 2022 00:30 UTC
End recorded: Dec 7, 2024 09:45 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:07 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT Applied Materials 0020-23278 8” SST Upper Shield 101% TIN Used Working

AMAT Applied Materials 0020-23278 8” SST Upper Shield 101% TIN Used Working

USD 411.1800

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Nov 19, 2018 19:42 UTC
End recorded: Dec 7, 2024 04:52 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:15 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0020-23278 Shield Upper, 12.9" Source, SST, 415665

AMAT 0020-23278 Shield Upper, 12.9" Source, SST, 415665

USD 550.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Aug 11, 2016 16:26 UTC
End recorded: Dec 6, 2024 23:50 UTC
Estimated remaining at check: 1
Estimated sold at check: 1

eBay response captured — Checked Oct 18, 2026 16:13 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay

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