Product description
Applied Materials 0020-23349 hub heater insulator / heater pedestal assembly component.
Specifications and identifiers
identification
| Description | Hub heater insulator |
|---|
| Related context | Heater pedestal assembly / Endura heater kit appears in evidence |
|---|
| Function | Insulating hub component for heater/pedestal hardware |
|---|
Equipment context
- Applied Materials Endura heater/pedestal subsystem
Applications
PVD/CVD process chambersESC and pedestal stacksgas distribution and chamber shielding hardwareHeater pedestal insulationEndura heater kit serviceProcess chamber heater hardware replacement
How it works
A process-facing chamber component used around the wafer, gas path, lift mechanism, or chamber wall.
Fit, material, surface condition, and cleanliness affect particle control, sealing, plasma behavior, and process uniformity.
What to verify before purchase
- Verify dimensions, material, and revision
- Inspect for cracks, burn marks, and contamination
- Confirm heater pedestal compatibility
Confirm with the seller
- Exact material and pedestal model are not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.