Product description
PC II / Preclean II pedestal, 8 inch / 200mm class
Specifications and identifiers
identification
| Part type | pedestal Mechanical wafer-support/process component. |
|---|
| Size/context | 8 inch / 200mm and PC II / Preclean II appear Associated with 200mm Preclean II/PVD style context. |
|---|
Applications
chambersload lockspedestalsgas boxesrobot and wafer-handling assemblieswafer support in preclean/PVD chamberpedestal replacement
How it works
A machined or formed component used for mounting, shielding, support, sealing, or gas/process hardware.
Small dimensional or material changes can affect vacuum sealing, plasma exposure, wafer clearance, or mechanical alignment.
Technical guide
aluminum
common lightweight machined tool material when stated
stainless steel
used for corrosion resistance and mechanical strength where stated
anodized
surface treatment for aluminum parts that improves wear/corrosion resistance when specified
- ASSY
- assembly
- ID
- inside diameter
- OD
- outside diameter
What to verify before purchase
- Confirm pedestal material, coating, revision, notch/features, and exact chamber compatibility.
Confirm with the seller
- Exact tool model and configuration are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.