Product description
Plate, 8 inch CCD vacuum seal, revised C
Specifications and identifiers
identification
| Part form | plate Mechanical plate used around a vacuum sealing interface. |
|---|
| Size/context | 8 inch CCD vacuum seal The supplied wording consistently associates it with an 8-inch CCD vacuum seal. |
|---|
| Revision wording | Revised C / CDSL-C-016 appears Revision and suffix should be verified. |
|---|
Applications
chambersload lockspedestalsgas boxesrobot and wafer-handling assembliesvacuum sealing plateorienter/chamber service spare
How it works
A machined or formed component used for mounting, shielding, support, sealing, or gas/process hardware.
Small dimensional or material changes can affect vacuum sealing, plasma exposure, wafer clearance, or mechanical alignment.
Technical guide
aluminum
common lightweight machined tool material when stated
stainless steel
used for corrosion resistance and mechanical strength where stated
anodized
surface treatment for aluminum parts that improves wear/corrosion resistance when specified
- ASSY
- assembly
- ID
- inside diameter
- OD
- outside diameter
What to verify before purchase
- Confirm dimensional drawing, revision C status, surface finish, and whether CDSL-C-016 applies.
Confirm with the seller
- Exact installed chamber or module is not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.