Product description
Clamp ring, 5 inch, SMRMF, TiN CR SST.
Specifications and identifiers
mechanical details
| Item | Clamp ring |
|---|
| Nominal Size | 5 in. |
|---|
| Markings Or Context | SMRMF |
|---|
| Material Finish | TiN CR SST |
|---|
| Interpretation | Titanium nitride-coated corrosion-resistant stainless steel is suggested by abbreviation, but exact alloy is not independently confirmed. |
|---|
Applications
Process chamber hardwareWafer support or containment assembliesEtch or deposition chamber serviceChamber clamp-ring replacementRetaining or locating chamber components
How it works
A clamp ring is a chamber hardware component used to retain or locate a wafer, shield, electrode, or process part.
Clamp-ring dimensions and surface finish are important because they affect fit, particle control, and chamber process compatibility.
Technical guide
SST
Common abbreviation for stainless steel.
TiN
Titanium nitride coating is commonly used as a hard, wear-resistant surface; here it is inferred from the provided abbreviation.
- CR
- May indicate corrosion resistant or a coating/finish context; verify from OEM drawing.
- SMRMF
- Abbreviation present in evidence; exact expansion not confirmed.
What to verify before purchase
- Confirm exact dimensions, coating, and material grade from drawing or part label.
- Verify whether SMRMF refers to a specific chamber family or configuration.
Confirm with the seller
- Specific tool compatibility beyond the provided part evidence is not independently confirmed.
- Calibration or functional status is not confirmed from the part identity alone.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.