Product description
Disposable honeycomb collimator plate, 6 inch class, 0.75 inch hex, 1.5:1, 11.3 reference
Specifications and identifiers
identification
| Component | Honeycomb collimator |
|---|
| Wafer/part size context | 6 inch |
|---|
| Geometry | 0.75 inch hex, 1.5:1, 11.3 reference Geometry terms should be verified against drawing or physical measurement. |
|---|
use context
| Use type | Disposable collimator |
|---|
Applications
PVD/sputter chamber hardwarecollimated depositionchamber consumable replacementcollimator replacementPVD chamber consumabledirectional deposition control
How it works
A honeycomb collimator is a chamber insert with many aligned passages that shape particle or plasma trajectories.
Collimator geometry and cleanliness can influence deposition directionality, process uniformity, and contamination control.
Technical guide
- aspect ratio
- Length-to-opening ratio, affecting directional filtering.
- hex
- Hexagonal cell geometry.
What to verify before purchase
- Verify dimensions, material, and aspect ratio.
- Confirm whether it is disposable and compatible with the target chamber.
- Inspect for contamination, erosion, or deformation.
Confirm with the seller
- Exact chamber platform and material are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.