Product description
Applied Materials 0020-24386 6 inch / 150 mm cover ring, described with 101 SST/MATL wording for PVD-related use.
Specifications and identifiers
identification
| Nominal size | 6 inch / 150 mm |
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| Description | Cover ring |
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| Material note | 101 SST/MATL appears in evidence; verify actual material |
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Applications
PVD or CVD chamber kitsESC/focus-ring stackswafer-area consumablesPVD chamber cover/focus-ring stackProcess-facing ring replacement150 mm chamber hardware
How it works
A shaped ring used around a wafer, chuck, or chamber opening as a process-facing mechanical component.
Geometry, material, coating, and cleanliness affect plasma behavior, sealing, contamination risk, and fit.
Technical guide
aluminum
common chamber hardware material
quartz
plasma-compatible ceramic glass used in high-temperature or plasma-exposed parts
stainless steel
metal used where durability and chemical resistance are needed
- 150 mm / 6 inch
- wafer-size class or ring nominal size
What to verify before purchase
- Verify material and coating
- Confirm revision and cleaned/refurbished status
- Check dimensions and process chamber compatibility
Confirm with the seller
- Exact material interpretation of 101 SST/MATL is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.